JPS59178374U - 化学気相成長装置 - Google Patents

化学気相成長装置

Info

Publication number
JPS59178374U
JPS59178374U JP7173283U JP7173283U JPS59178374U JP S59178374 U JPS59178374 U JP S59178374U JP 7173283 U JP7173283 U JP 7173283U JP 7173283 U JP7173283 U JP 7173283U JP S59178374 U JPS59178374 U JP S59178374U
Authority
JP
Japan
Prior art keywords
substrate
introduction pipe
gas
quartz plate
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7173283U
Other languages
English (en)
Japanese (ja)
Other versions
JPS641956Y2 (enrdf_load_stackoverflow
Inventor
古川　量三
正男 小林
健 上條
紘 高野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP7173283U priority Critical patent/JPS59178374U/ja
Publication of JPS59178374U publication Critical patent/JPS59178374U/ja
Application granted granted Critical
Publication of JPS641956Y2 publication Critical patent/JPS641956Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP7173283U 1983-05-16 1983-05-16 化学気相成長装置 Granted JPS59178374U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7173283U JPS59178374U (ja) 1983-05-16 1983-05-16 化学気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7173283U JPS59178374U (ja) 1983-05-16 1983-05-16 化学気相成長装置

Publications (2)

Publication Number Publication Date
JPS59178374U true JPS59178374U (ja) 1984-11-29
JPS641956Y2 JPS641956Y2 (enrdf_load_stackoverflow) 1989-01-18

Family

ID=30201885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7173283U Granted JPS59178374U (ja) 1983-05-16 1983-05-16 化学気相成長装置

Country Status (1)

Country Link
JP (1) JPS59178374U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876139A (ja) * 1981-11-02 1983-05-09 Hitachi Ltd 気相成長方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876139A (ja) * 1981-11-02 1983-05-09 Hitachi Ltd 気相成長方法

Also Published As

Publication number Publication date
JPS641956Y2 (enrdf_load_stackoverflow) 1989-01-18

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