JPS641956Y2 - - Google Patents

Info

Publication number
JPS641956Y2
JPS641956Y2 JP1983071732U JP7173283U JPS641956Y2 JP S641956 Y2 JPS641956 Y2 JP S641956Y2 JP 1983071732 U JP1983071732 U JP 1983071732U JP 7173283 U JP7173283 U JP 7173283U JP S641956 Y2 JPS641956 Y2 JP S641956Y2
Authority
JP
Japan
Prior art keywords
substrate
gas
quartz plate
introduction pipe
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983071732U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59178374U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7173283U priority Critical patent/JPS59178374U/ja
Publication of JPS59178374U publication Critical patent/JPS59178374U/ja
Application granted granted Critical
Publication of JPS641956Y2 publication Critical patent/JPS641956Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP7173283U 1983-05-16 1983-05-16 化学気相成長装置 Granted JPS59178374U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7173283U JPS59178374U (ja) 1983-05-16 1983-05-16 化学気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7173283U JPS59178374U (ja) 1983-05-16 1983-05-16 化学気相成長装置

Publications (2)

Publication Number Publication Date
JPS59178374U JPS59178374U (ja) 1984-11-29
JPS641956Y2 true JPS641956Y2 (enrdf_load_stackoverflow) 1989-01-18

Family

ID=30201885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7173283U Granted JPS59178374U (ja) 1983-05-16 1983-05-16 化学気相成長装置

Country Status (1)

Country Link
JP (1) JPS59178374U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876139A (ja) * 1981-11-02 1983-05-09 Hitachi Ltd 気相成長方法

Also Published As

Publication number Publication date
JPS59178374U (ja) 1984-11-29

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