JPS59177668A - パタ−ン情報処理装置 - Google Patents

パタ−ン情報処理装置

Info

Publication number
JPS59177668A
JPS59177668A JP58051504A JP5150483A JPS59177668A JP S59177668 A JPS59177668 A JP S59177668A JP 58051504 A JP58051504 A JP 58051504A JP 5150483 A JP5150483 A JP 5150483A JP S59177668 A JPS59177668 A JP S59177668A
Authority
JP
Japan
Prior art keywords
data
pattern
signal
pulse
address
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58051504A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0411802B2 (enExample
Inventor
Shigeo Murakami
成郎 村上
Muneki Hamashima
宗樹 浜島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP58051504A priority Critical patent/JPS59177668A/ja
Publication of JPS59177668A publication Critical patent/JPS59177668A/ja
Priority to US06/851,293 priority patent/US4639604A/en
Publication of JPH0411802B2 publication Critical patent/JPH0411802B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP58051504A 1983-03-29 1983-03-29 パタ−ン情報処理装置 Granted JPS59177668A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58051504A JPS59177668A (ja) 1983-03-29 1983-03-29 パタ−ン情報処理装置
US06/851,293 US4639604A (en) 1983-03-29 1986-04-04 Method and apparatus for detecting an edge position of a pattern and eliminating overlapping pattern signals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58051504A JPS59177668A (ja) 1983-03-29 1983-03-29 パタ−ン情報処理装置

Publications (2)

Publication Number Publication Date
JPS59177668A true JPS59177668A (ja) 1984-10-08
JPH0411802B2 JPH0411802B2 (enExample) 1992-03-02

Family

ID=12888818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58051504A Granted JPS59177668A (ja) 1983-03-29 1983-03-29 パタ−ン情報処理装置

Country Status (1)

Country Link
JP (1) JPS59177668A (enExample)

Also Published As

Publication number Publication date
JPH0411802B2 (enExample) 1992-03-02

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