JPS5917104A - 形状検査装置 - Google Patents

形状検査装置

Info

Publication number
JPS5917104A
JPS5917104A JP12783682A JP12783682A JPS5917104A JP S5917104 A JPS5917104 A JP S5917104A JP 12783682 A JP12783682 A JP 12783682A JP 12783682 A JP12783682 A JP 12783682A JP S5917104 A JPS5917104 A JP S5917104A
Authority
JP
Japan
Prior art keywords
inspected
light source
image
half mirror
camera
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12783682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS64643B2 (OSRAM
Inventor
Futoshi Fuchita
渕田　太志
Shinji Okamoto
岡本　紳二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP12783682A priority Critical patent/JPS5917104A/ja
Publication of JPS5917104A publication Critical patent/JPS5917104A/ja
Publication of JPS64643B2 publication Critical patent/JPS64643B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP12783682A 1982-07-21 1982-07-21 形状検査装置 Granted JPS5917104A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12783682A JPS5917104A (ja) 1982-07-21 1982-07-21 形状検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12783682A JPS5917104A (ja) 1982-07-21 1982-07-21 形状検査装置

Publications (2)

Publication Number Publication Date
JPS5917104A true JPS5917104A (ja) 1984-01-28
JPS64643B2 JPS64643B2 (OSRAM) 1989-01-09

Family

ID=14969858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12783682A Granted JPS5917104A (ja) 1982-07-21 1982-07-21 形状検査装置

Country Status (1)

Country Link
JP (1) JPS5917104A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6366445A (ja) * 1986-09-09 1988-03-25 Ikegami Tsushinki Co Ltd 外観検査装置
JPS648606U (OSRAM) * 1987-07-03 1989-01-18
EP0466209B1 (en) * 1986-09-29 1996-10-02 Kabushiki Kaisha Yaskawa Denki Seisakusho Absolute encoder of the multirotation type

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55106305A (en) * 1979-02-07 1980-08-15 Kureha Chem Ind Co Ltd Measuring method for pattern area
JPS5654307A (en) * 1979-10-09 1981-05-14 Inoue Japax Res Inc Measuring instrument for work precision
JPS5662508U (OSRAM) * 1979-10-22 1981-05-27

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55106305A (en) * 1979-02-07 1980-08-15 Kureha Chem Ind Co Ltd Measuring method for pattern area
JPS5654307A (en) * 1979-10-09 1981-05-14 Inoue Japax Res Inc Measuring instrument for work precision
JPS5662508U (OSRAM) * 1979-10-22 1981-05-27

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6366445A (ja) * 1986-09-09 1988-03-25 Ikegami Tsushinki Co Ltd 外観検査装置
EP0466209B1 (en) * 1986-09-29 1996-10-02 Kabushiki Kaisha Yaskawa Denki Seisakusho Absolute encoder of the multirotation type
EP0464870B1 (en) * 1986-09-29 1996-10-02 Kabushiki Kaisha Yaskawa Denki Seisakusho Absolute encoder of the multirotation type
EP0463643B1 (en) * 1986-09-29 1996-10-02 Kabushiki Kaisha Yaskawa Denki Seisakusho Absolute encoder of the multirotation type
JPS648606U (OSRAM) * 1987-07-03 1989-01-18

Also Published As

Publication number Publication date
JPS64643B2 (OSRAM) 1989-01-09

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