JPS59167088A - 集積回路装置の製造方法 - Google Patents

集積回路装置の製造方法

Info

Publication number
JPS59167088A
JPS59167088A JP4172183A JP4172183A JPS59167088A JP S59167088 A JPS59167088 A JP S59167088A JP 4172183 A JP4172183 A JP 4172183A JP 4172183 A JP4172183 A JP 4172183A JP S59167088 A JPS59167088 A JP S59167088A
Authority
JP
Japan
Prior art keywords
integrated circuit
circuit
substrate
film
film integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4172183A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0148670B2 (enExample
Inventor
小崎　良一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4172183A priority Critical patent/JPS59167088A/ja
Publication of JPS59167088A publication Critical patent/JPS59167088A/ja
Publication of JPH0148670B2 publication Critical patent/JPH0148670B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Combinations Of Printed Boards (AREA)
  • Networks Using Active Elements (AREA)
JP4172183A 1983-03-14 1983-03-14 集積回路装置の製造方法 Granted JPS59167088A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4172183A JPS59167088A (ja) 1983-03-14 1983-03-14 集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4172183A JPS59167088A (ja) 1983-03-14 1983-03-14 集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59167088A true JPS59167088A (ja) 1984-09-20
JPH0148670B2 JPH0148670B2 (enExample) 1989-10-20

Family

ID=12616279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4172183A Granted JPS59167088A (ja) 1983-03-14 1983-03-14 集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59167088A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618454A (en) * 1979-07-25 1981-02-21 Hitachi Ltd Hybrid integrated circuit
JPS5645050A (en) * 1979-09-21 1981-04-24 Hitachi Ltd Thin film integrated circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618454A (en) * 1979-07-25 1981-02-21 Hitachi Ltd Hybrid integrated circuit
JPS5645050A (en) * 1979-09-21 1981-04-24 Hitachi Ltd Thin film integrated circuit

Also Published As

Publication number Publication date
JPH0148670B2 (enExample) 1989-10-20

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