JPS59155440A - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPS59155440A
JPS59155440A JP58029370A JP2937083A JPS59155440A JP S59155440 A JPS59155440 A JP S59155440A JP 58029370 A JP58029370 A JP 58029370A JP 2937083 A JP2937083 A JP 2937083A JP S59155440 A JPS59155440 A JP S59155440A
Authority
JP
Japan
Prior art keywords
plasma
tube
reaction chamber
java
plasma processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58029370A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0495B2 (enrdf_load_stackoverflow
Inventor
Takaoki Kaneko
金子　隆興
Yoshinobu Takahashi
芳信 高橋
Kenji Fukuda
賢治 福田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP58029370A priority Critical patent/JPS59155440A/ja
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to AU24671/84A priority patent/AU549376B2/en
Priority to ZA841294A priority patent/ZA841294B/xx
Priority to DE3486470T priority patent/DE3486470T2/de
Priority to DE3486317T priority patent/DE3486317T2/de
Priority to EP91115536A priority patent/EP0461683B1/en
Priority to EP84101926A priority patent/EP0120307B1/en
Publication of JPS59155440A publication Critical patent/JPS59155440A/ja
Priority to AU49495/85A priority patent/AU578757B2/en
Priority to US06/825,941 priority patent/US4678644A/en
Priority to AU82237/87A priority patent/AU8223787A/en
Priority to AU82240/87A priority patent/AU603397B2/en
Priority to AU82238/87A priority patent/AU8223887A/en
Priority to AU82239/87A priority patent/AU8223987A/en
Publication of JPH0495B2 publication Critical patent/JPH0495B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/19—Details relating to the geometry of the reactor
    • B01J2219/194—Details relating to the geometry of the reactor round
    • B01J2219/1941—Details relating to the geometry of the reactor round circular or disk-shaped
    • B01J2219/1942—Details relating to the geometry of the reactor round circular or disk-shaped spherical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2023/00—Use of polyalkenes or derivatives thereof as moulding material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/182—Obtaining or maintaining desired pressure
    • H01J2237/1825—Evacuating means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/336—Changing physical properties of treated surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP58029370A 1983-02-25 1983-02-25 プラズマ処理装置 Granted JPS59155440A (ja)

Priority Applications (13)

Application Number Priority Date Filing Date Title
JP58029370A JPS59155440A (ja) 1983-02-25 1983-02-25 プラズマ処理装置
AU24671/84A AU549376B2 (en) 1983-02-25 1984-02-16 Plasma treatment
ZA841294A ZA841294B (en) 1983-02-25 1984-02-22 Apparatus and method for plasma treatment of resin material
DE3486470T DE3486470T2 (de) 1983-02-25 1984-02-23 Verfahren zum Plasmabehandeln von Kunststoffharz
DE3486317T DE3486317T2 (de) 1983-02-25 1984-02-23 Vorrichtung und Verfahren zur Plasmabehandlung von Kunstharz.
EP91115536A EP0461683B1 (en) 1983-02-25 1984-02-23 Method for plasma treatment of resin material
EP84101926A EP0120307B1 (en) 1983-02-25 1984-02-23 Apparatus and method for plasma treatment of resin material
AU49495/85A AU578757B2 (en) 1983-02-25 1985-11-08 Method for plasma treatment of resin material
US06/825,941 US4678644A (en) 1983-02-25 1986-01-30 Apparatus and method for plasma treatment of resin material
AU82237/87A AU8223787A (en) 1983-02-25 1987-12-08 Apparatus and method for plasma treatment of resin material
AU82240/87A AU603397B2 (en) 1983-02-25 1987-12-08 Apparatus and method for plasma treatment of resin material
AU82238/87A AU8223887A (en) 1983-02-25 1987-12-08 Apparatus and method for plasma treatment of resin material
AU82239/87A AU8223987A (en) 1983-02-25 1987-12-08 Apparatus and method for plasma treatment of resin material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58029370A JPS59155440A (ja) 1983-02-25 1983-02-25 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS59155440A true JPS59155440A (ja) 1984-09-04
JPH0495B2 JPH0495B2 (enrdf_load_stackoverflow) 1992-01-06

Family

ID=12274259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58029370A Granted JPS59155440A (ja) 1983-02-25 1983-02-25 プラズマ処理装置

Country Status (3)

Country Link
JP (1) JPS59155440A (enrdf_load_stackoverflow)
AU (1) AU578757B2 (enrdf_load_stackoverflow)
ZA (1) ZA841294B (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61155342U (enrdf_load_stackoverflow) * 1985-03-16 1986-09-26
JPS62101634A (ja) * 1985-10-30 1987-05-12 Hashimoto Forming Co Ltd 装飾用モールディングの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211175A (en) * 1975-07-18 1977-01-27 Toshiba Corp Activated gas reacting apparatus
JPS5378170A (en) * 1976-12-22 1978-07-11 Toshiba Corp Continuous processor for gas plasma etching
JPS53121469A (en) * 1977-03-31 1978-10-23 Toshiba Corp Gas etching unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61155342U (enrdf_load_stackoverflow) * 1985-03-16 1986-09-26
JPS62101634A (ja) * 1985-10-30 1987-05-12 Hashimoto Forming Co Ltd 装飾用モールディングの製造方法

Also Published As

Publication number Publication date
ZA841294B (en) 1984-10-31
JPH0495B2 (enrdf_load_stackoverflow) 1992-01-06
AU4949585A (en) 1986-04-24
AU578757B2 (en) 1988-11-03

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