JPS61155342U - - Google Patents

Info

Publication number
JPS61155342U
JPS61155342U JP3776785U JP3776785U JPS61155342U JP S61155342 U JPS61155342 U JP S61155342U JP 3776785 U JP3776785 U JP 3776785U JP 3776785 U JP3776785 U JP 3776785U JP S61155342 U JPS61155342 U JP S61155342U
Authority
JP
Japan
Prior art keywords
activated gas
gas jetting
workpiece installation
activated
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3776785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0348193Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985037767U priority Critical patent/JPH0348193Y2/ja
Publication of JPS61155342U publication Critical patent/JPS61155342U/ja
Application granted granted Critical
Publication of JPH0348193Y2 publication Critical patent/JPH0348193Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1985037767U 1985-03-16 1985-03-16 Expired JPH0348193Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985037767U JPH0348193Y2 (enrdf_load_stackoverflow) 1985-03-16 1985-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985037767U JPH0348193Y2 (enrdf_load_stackoverflow) 1985-03-16 1985-03-16

Publications (2)

Publication Number Publication Date
JPS61155342U true JPS61155342U (enrdf_load_stackoverflow) 1986-09-26
JPH0348193Y2 JPH0348193Y2 (enrdf_load_stackoverflow) 1991-10-15

Family

ID=30544151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985037767U Expired JPH0348193Y2 (enrdf_load_stackoverflow) 1985-03-16 1985-03-16

Country Status (1)

Country Link
JP (1) JPH0348193Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155440A (ja) * 1983-02-25 1984-09-04 Toyota Motor Corp プラズマ処理装置
JPS59155442A (ja) * 1983-02-25 1984-09-04 Toyota Motor Corp プラズマ処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59155440A (ja) * 1983-02-25 1984-09-04 Toyota Motor Corp プラズマ処理装置
JPS59155442A (ja) * 1983-02-25 1984-09-04 Toyota Motor Corp プラズマ処理装置

Also Published As

Publication number Publication date
JPH0348193Y2 (enrdf_load_stackoverflow) 1991-10-15

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