AU4949585A - Method for plasma treatment of resin material - Google Patents

Method for plasma treatment of resin material

Info

Publication number
AU4949585A
AU4949585A AU49495/85A AU4949585A AU4949585A AU 4949585 A AU4949585 A AU 4949585A AU 49495/85 A AU49495/85 A AU 49495/85A AU 4949585 A AU4949585 A AU 4949585A AU 4949585 A AU4949585 A AU 4949585A
Authority
AU
Australia
Prior art keywords
resin material
plasma treatment
plasma
treatment
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU49495/85A
Other versions
AU578757B2 (en
Inventor
Kenji Fukuta
Takaoki Kaneko
Yoshinobu Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Publication of AU4949585A publication Critical patent/AU4949585A/en
Application granted granted Critical
Publication of AU578757B2 publication Critical patent/AU578757B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/19—Details relating to the geometry of the reactor
    • B01J2219/194—Details relating to the geometry of the reactor round
    • B01J2219/1941—Details relating to the geometry of the reactor round circular or disk-shaped
    • B01J2219/1942—Details relating to the geometry of the reactor round circular or disk-shaped spherical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2023/00—Use of polyalkenes or derivatives thereof as moulding material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/182—Obtaining or maintaining desired pressure
    • H01J2237/1825—Evacuating means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/336—Changing physical properties of treated surfaces
AU49495/85A 1983-02-25 1985-11-08 Method for plasma treatment of resin material Ceased AU578757B2 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP58-029370 1983-02-25
JP58029370A JPS59155440A (en) 1983-02-25 1983-02-25 Apparatus for plasma treatment
JP58-063735 1983-04-13
JP58-063734 1983-04-13
JP58-063733 1983-04-13
JP58-115273 1983-06-28
JP58-115274 1983-06-28
JP58-134416 1983-07-25

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
AU24671/84A Division AU549376B2 (en) 1983-02-25 1984-02-16 Plasma treatment

Related Child Applications (4)

Application Number Title Priority Date Filing Date
AU82238/87A Division AU8223887A (en) 1983-02-25 1987-12-08 Apparatus and method for plasma treatment of resin material
AU82237/87A Division AU8223787A (en) 1983-02-25 1987-12-08 Apparatus and method for plasma treatment of resin material
AU82239/87A Division AU8223987A (en) 1983-02-25 1987-12-08 Apparatus and method for plasma treatment of resin material
AU82240/87A Division AU603397B2 (en) 1983-02-25 1987-12-08 Apparatus and method for plasma treatment of resin material

Publications (2)

Publication Number Publication Date
AU4949585A true AU4949585A (en) 1986-04-24
AU578757B2 AU578757B2 (en) 1988-11-03

Family

ID=12274259

Family Applications (1)

Application Number Title Priority Date Filing Date
AU49495/85A Ceased AU578757B2 (en) 1983-02-25 1985-11-08 Method for plasma treatment of resin material

Country Status (3)

Country Link
JP (1) JPS59155440A (en)
AU (1) AU578757B2 (en)
ZA (1) ZA841294B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0348193Y2 (en) * 1985-03-16 1991-10-15
JPS62101634A (en) * 1985-10-30 1987-05-12 Hashimoto Forming Co Ltd Production of molding

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211175A (en) * 1975-07-18 1977-01-27 Toshiba Corp Activated gas reacting apparatus
JPS5378170A (en) * 1976-12-22 1978-07-11 Toshiba Corp Continuous processor for gas plasma etching
JPS53121469A (en) * 1977-03-31 1978-10-23 Toshiba Corp Gas etching unit

Also Published As

Publication number Publication date
ZA841294B (en) 1984-10-31
JPH0495B2 (en) 1992-01-06
JPS59155440A (en) 1984-09-04
AU578757B2 (en) 1988-11-03

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