JPS59143330A - プラズマエツチング装置 - Google Patents

プラズマエツチング装置

Info

Publication number
JPS59143330A
JPS59143330A JP59014980A JP1498084A JPS59143330A JP S59143330 A JPS59143330 A JP S59143330A JP 59014980 A JP59014980 A JP 59014980A JP 1498084 A JP1498084 A JP 1498084A JP S59143330 A JPS59143330 A JP S59143330A
Authority
JP
Japan
Prior art keywords
chamber
plasma
magnetic field
substrate
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59014980A
Other languages
English (en)
Japanese (ja)
Inventor
トーマス・デイー・マンテイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UNI SHINSHINATEI
YUNIBAASHITEI OBU SHINSHINATEI
Original Assignee
UNI SHINSHINATEI
YUNIBAASHITEI OBU SHINSHINATEI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UNI SHINSHINATEI, YUNIBAASHITEI OBU SHINSHINATEI filed Critical UNI SHINSHINATEI
Publication of JPS59143330A publication Critical patent/JPS59143330A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32688—Multi-cusp fields

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Plasma Technology (AREA)
JP59014980A 1983-01-31 1984-01-30 プラズマエツチング装置 Pending JPS59143330A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/462,200 US4483737A (en) 1983-01-31 1983-01-31 Method and apparatus for plasma etching a substrate

Publications (1)

Publication Number Publication Date
JPS59143330A true JPS59143330A (ja) 1984-08-16

Family

ID=23835545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59014980A Pending JPS59143330A (ja) 1983-01-31 1984-01-30 プラズマエツチング装置

Country Status (2)

Country Link
US (1) US4483737A (enExample)
JP (1) JPS59143330A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60246599A (ja) * 1983-06-15 1985-12-06 セントル・ナシヨナル・ドウ・ラ・ルシエルシユ・サイエンテイフイツク（セ・エン・エ−ル・エス） 高密度・低電子温度の均質大容積プラズマ発生方法および装置
JPS62172700A (ja) * 1986-01-24 1987-07-29 理化学研究所 プラズマ閉込用磁場発生装置
JPH02235332A (ja) * 1989-01-25 1990-09-18 Internatl Business Mach Corp <Ibm> プラズマ処理装置

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JPS59175125A (ja) * 1983-03-24 1984-10-03 Toshiba Corp ドライエツチング装置
JPS6021382A (ja) * 1983-07-15 1985-02-02 Canon Inc プラズマｃｖｄ装置
US4572759A (en) * 1984-12-26 1986-02-25 Benzing Technology, Inc. Troide plasma reactor with magnetic enhancement
US4623417A (en) * 1985-08-23 1986-11-18 Texas Instruments Incorporated Magnetron plasma reactor
US4786352A (en) * 1986-09-12 1988-11-22 Benzing Technologies, Inc. Apparatus for in-situ chamber cleaning
GB8622820D0 (en) * 1986-09-23 1986-10-29 Nordiko Ltd Electrode assembly & apparatus
JPH0834205B2 (ja) * 1986-11-21 1996-03-29 株式会社東芝 ドライエツチング装置
KR880013424A (ko) * 1987-04-08 1988-11-30 미타 가츠시게 플라즈머 장치
US5643473A (en) * 1987-07-31 1997-07-01 Hitachi, Ltd. Dry etching method
US5032205A (en) * 1989-05-05 1991-07-16 Wisconsin Alumni Research Foundation Plasma etching apparatus with surface magnetic fields
US4990229A (en) * 1989-06-13 1991-02-05 Plasma & Materials Technologies, Inc. High density plasma deposition and etching apparatus
US5032202A (en) * 1989-10-03 1991-07-16 Martin Marietta Energy Systems, Inc. Plasma generating apparatus for large area plasma processing
US5196670A (en) * 1989-10-03 1993-03-23 University Of Cincinnati Magnetic plasma producing device with adjustable resonance plane
DE69218720T2 (de) * 1991-10-17 1997-07-17 Applied Materials Inc Plasmareaktor
US5306985A (en) * 1992-07-17 1994-04-26 Sematech, Inc. ECR apparatus with magnetic coil for plasma refractive index control
US5457298A (en) * 1993-07-27 1995-10-10 Tulip Memory Systems, Inc. Coldwall hollow-cathode plasma device for support of gas discharges
US5451259A (en) * 1994-02-17 1995-09-19 Krogh; Ole D. ECR plasma source for remote processing
US5869802A (en) * 1995-12-21 1999-02-09 Plasmaquest, Inc. Plasma producing structure
TW303480B (en) * 1996-01-24 1997-04-21 Applied Materials Inc Magnetically confined plasma reactor for processing a semiconductor wafer
US6048435A (en) * 1996-07-03 2000-04-11 Tegal Corporation Plasma etch reactor and method for emerging films
US6500314B1 (en) * 1996-07-03 2002-12-31 Tegal Corporation Plasma etch reactor and method
US6165375A (en) * 1997-09-23 2000-12-26 Cypress Semiconductor Corporation Plasma etching method
US6163006A (en) * 1998-02-06 2000-12-19 Astex-Plasmaquest, Inc. Permanent magnet ECR plasma source with magnetic field optimization
US20020069970A1 (en) * 2000-03-07 2002-06-13 Applied Materials, Inc. Temperature controlled semiconductor processing chamber liner
US6652763B1 (en) * 2000-04-03 2003-11-25 Hrl Laboratories, Llc Method and apparatus for large-scale diamond polishing
US6863835B1 (en) 2000-04-25 2005-03-08 James D. Carducci Magnetic barrier for plasma in chamber exhaust
US6664740B2 (en) * 2001-02-01 2003-12-16 The Regents Of The University Of California Formation of a field reversed configuration for magnetic and electrostatic confinement of plasma
US6611106B2 (en) * 2001-03-19 2003-08-26 The Regents Of The University Of California Controlled fusion in a field reversed configuration and direct energy conversion
US6602381B1 (en) 2001-04-30 2003-08-05 Lam Research Corporation Plasma confinement by use of preferred RF return path
US7632375B2 (en) * 2004-12-30 2009-12-15 Lam Research Corporation Electrically enhancing the confinement of plasma
US9607719B2 (en) 2005-03-07 2017-03-28 The Regents Of The University Of California Vacuum chamber for plasma electric generation system
US8031824B2 (en) * 2005-03-07 2011-10-04 Regents Of The University Of California Inductive plasma source for plasma electric generation system
US9123512B2 (en) * 2005-03-07 2015-09-01 The Regents Of The Unviersity Of California RF current drive for plasma electric generation system
US8444926B2 (en) * 2007-01-30 2013-05-21 Applied Materials, Inc. Processing chamber with heated chamber liner
CN101728224B (zh) * 2008-10-10 2012-05-23 鼎岳科技股份有限公司 利用于半导体的制造设备以及制造方法
DK2251454T3 (da) 2009-05-13 2014-10-13 Sio2 Medical Products Inc Coating og inspektion af beholder
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
AU2012318242A1 (en) 2011-11-11 2013-05-30 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
CA2855698C (en) 2011-11-14 2020-03-10 The Regents Of The University Of California Systems and methods for forming and maintaining a high performance frc
EP2846755A1 (en) 2012-05-09 2015-03-18 SiO2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US20150297800A1 (en) 2012-07-03 2015-10-22 Sio2 Medical Products, Inc. SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS
CA2890066C (en) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
WO2014078666A1 (en) 2012-11-16 2014-05-22 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
EP2925903B1 (en) 2012-11-30 2022-04-13 Si02 Medical Products, Inc. Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
EP2961858B1 (en) 2013-03-01 2022-09-07 Si02 Medical Products, Inc. Coated syringe.
CN105392916B (zh) 2013-03-11 2019-03-08 Sio2医药产品公司 涂布包装材料
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
EP2971227B1 (en) 2013-03-15 2017-11-15 Si02 Medical Products, Inc. Coating method.
CA2924205C (en) 2013-09-24 2023-01-10 Tri Alpha Energy, Inc. Systems and methods for forming and maintaining a high performance frc
EP3693493A1 (en) 2014-03-28 2020-08-12 SiO2 Medical Products, Inc. Antistatic coatings for plastic vessels
MY182756A (en) 2014-10-13 2021-02-05 Tri Alpha Energy Inc Systems and methods for merging and compressing compact tori
MX369532B (es) 2014-10-30 2019-11-11 Tae Tech Inc Sistemas y metodos para formar y mantener una configuracion de campo invertido (frc) de alto rendimiento.
SI3295459T1 (sl) 2015-05-12 2021-04-30 Tae Technologies, Inc. Sistemi in postopki za zmanjšanje neželenih vrtinčnih tokov
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
DK3357067T3 (da) 2015-11-13 2021-11-22 Tae Tech Inc Systemer og fremgangsmåder til frc- plasmapositionsstabilitet
BR112019008478B1 (pt) 2016-10-28 2024-03-05 Tae Technologies, Inc Método para gerar e manter um campo magnético com uma configuração de campo reverso (frc)
JP7365693B2 (ja) 2016-11-04 2023-10-20 ティーエーイー テクノロジーズ， インコーポレイテッド マルチスケール捕捉タイプ真空ポンピングを用いた高性能ｆｒｃの改良された持続性のためのシステムおよび方法
PE20190836A1 (es) 2016-11-15 2019-06-17 Tae Tech Inc Sistemas y metodos para mejorar el sostenimiento de una frc de alto rendimiento y un calentado de los electrones de onda rapida de alta armonica en una frc de alto redimiento
BR112022013552A2 (pt) 2020-01-13 2022-09-06 Tae Tech Inc Sistema e métodos para formação e manutenção de plasma frc de alta energia e temperatura por meio de fusão de esferoma e injeção de feixe neutro

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494282A (en) * 1977-12-30 1979-07-25 Ibm Negative ion extractor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4361472A (en) * 1980-09-15 1982-11-30 Vac-Tec Systems, Inc. Sputtering method and apparatus utilizing improved ion source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494282A (en) * 1977-12-30 1979-07-25 Ibm Negative ion extractor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60246599A (ja) * 1983-06-15 1985-12-06 セントル・ナシヨナル・ドウ・ラ・ルシエルシユ・サイエンテイフイツク（セ・エン・エ−ル・エス） 高密度・低電子温度の均質大容積プラズマ発生方法および装置
JPS62172700A (ja) * 1986-01-24 1987-07-29 理化学研究所 プラズマ閉込用磁場発生装置
JPH02235332A (ja) * 1989-01-25 1990-09-18 Internatl Business Mach Corp <Ibm> プラズマ処理装置

Also Published As

Publication number Publication date
US4483737B1 (enExample) 1991-07-30
US4483737A (en) 1984-11-20

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