JPS59142452A - イオンセンサ - Google Patents

イオンセンサ

Info

Publication number
JPS59142452A
JPS59142452A JP58015656A JP1565683A JPS59142452A JP S59142452 A JPS59142452 A JP S59142452A JP 58015656 A JP58015656 A JP 58015656A JP 1565683 A JP1565683 A JP 1565683A JP S59142452 A JPS59142452 A JP S59142452A
Authority
JP
Japan
Prior art keywords
film
ion
gate
insulating film
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58015656A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452409B2 (enrdf_load_stackoverflow
Inventor
Hiromitsu Shiraki
白木　広光
Hiroshi Sakuma
啓 佐久間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP58015656A priority Critical patent/JPS59142452A/ja
Publication of JPS59142452A publication Critical patent/JPS59142452A/ja
Publication of JPH0452409B2 publication Critical patent/JPH0452409B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP58015656A 1983-02-02 1983-02-02 イオンセンサ Granted JPS59142452A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58015656A JPS59142452A (ja) 1983-02-02 1983-02-02 イオンセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58015656A JPS59142452A (ja) 1983-02-02 1983-02-02 イオンセンサ

Publications (2)

Publication Number Publication Date
JPS59142452A true JPS59142452A (ja) 1984-08-15
JPH0452409B2 JPH0452409B2 (enrdf_load_stackoverflow) 1992-08-21

Family

ID=11894767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58015656A Granted JPS59142452A (ja) 1983-02-02 1983-02-02 イオンセンサ

Country Status (1)

Country Link
JP (1) JPS59142452A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62144059A (ja) * 1985-12-18 1987-06-27 Shindengen Electric Mfg Co Ltd イオンセンサ
JPH0161655U (enrdf_load_stackoverflow) * 1987-10-13 1989-04-19
WO1989009932A1 (en) * 1988-04-14 1989-10-19 Terumo Kabushiki Kaisha Ion sensor
US10845348B2 (en) 2015-12-16 2020-11-24 Panasonic Intellectual Property Management Co., Ltd. Gas sensor and gas sensing system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870155A (ja) * 1981-07-24 1983-04-26 フオンダシヨン・スイス・プ−ル・ラ・レシエルシユ・アン・ミクロテクニク イオンに応答する半導体装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870155A (ja) * 1981-07-24 1983-04-26 フオンダシヨン・スイス・プ−ル・ラ・レシエルシユ・アン・ミクロテクニク イオンに応答する半導体装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62144059A (ja) * 1985-12-18 1987-06-27 Shindengen Electric Mfg Co Ltd イオンセンサ
JPH0161655U (enrdf_load_stackoverflow) * 1987-10-13 1989-04-19
WO1989009932A1 (en) * 1988-04-14 1989-10-19 Terumo Kabushiki Kaisha Ion sensor
US10845348B2 (en) 2015-12-16 2020-11-24 Panasonic Intellectual Property Management Co., Ltd. Gas sensor and gas sensing system

Also Published As

Publication number Publication date
JPH0452409B2 (enrdf_load_stackoverflow) 1992-08-21

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