JPS59142447A - 湿度センサーの製造方法 - Google Patents
湿度センサーの製造方法Info
- Publication number
- JPS59142447A JPS59142447A JP58017106A JP1710683A JPS59142447A JP S59142447 A JPS59142447 A JP S59142447A JP 58017106 A JP58017106 A JP 58017106A JP 1710683 A JP1710683 A JP 1710683A JP S59142447 A JPS59142447 A JP S59142447A
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- sensor
- present
- humidity sensor
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 14
- 150000003961 organosilicon compounds Chemical class 0.000 claims description 7
- 229910021529 ammonia Inorganic materials 0.000 claims description 5
- 238000006116 polymerization reaction Methods 0.000 description 18
- 229920006254 polymer film Polymers 0.000 description 15
- 239000000758 substrate Substances 0.000 description 8
- 239000000523 sample Substances 0.000 description 7
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 description 7
- 230000004044 response Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008961 swelling Effects 0.000 description 2
- DLYUQMMRRRQYAE-UHFFFAOYSA-N tetraphosphorus decaoxide Chemical compound O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- OQZCJRJRGMMSGK-UHFFFAOYSA-M potassium metaphosphate Chemical compound [K+].[O-]P(=O)=O OQZCJRJRGMMSGK-UHFFFAOYSA-M 0.000 description 1
- 229940099402 potassium metaphosphate Drugs 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000026041 response to humidity Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58017106A JPS59142447A (ja) | 1983-02-04 | 1983-02-04 | 湿度センサーの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58017106A JPS59142447A (ja) | 1983-02-04 | 1983-02-04 | 湿度センサーの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59142447A true JPS59142447A (ja) | 1984-08-15 |
| JPH0415413B2 JPH0415413B2 (enrdf_load_stackoverflow) | 1992-03-17 |
Family
ID=11934773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58017106A Granted JPS59142447A (ja) | 1983-02-04 | 1983-02-04 | 湿度センサーの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59142447A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61200454A (ja) * | 1985-03-01 | 1986-09-05 | Nok Corp | 薄膜感湿素子 |
| JPS61237044A (ja) * | 1985-04-12 | 1986-10-22 | Hamamatsu Photonics Kk | 湿度検出素子およびその製造方法 |
| JPS6347646A (ja) * | 1986-08-13 | 1988-02-29 | Nok Corp | 感湿素子 |
| JPS6395347A (ja) * | 1986-10-09 | 1988-04-26 | Nok Corp | 湿度センサ |
| JPS63177050A (ja) * | 1986-09-05 | 1988-07-21 | Nok Corp | 感湿素子 |
| JPH06307339A (ja) * | 1993-04-24 | 1994-11-01 | Samsung Electronics Co Ltd | 圧縮機の騒音減衰器 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192846A (en) * | 1981-05-15 | 1982-11-27 | Yamatake Honeywell Co Ltd | Humidity sensor and manufacture thereof |
| JPS58176538A (ja) * | 1982-04-09 | 1983-10-17 | Sharp Corp | 感湿抵抗素子 |
-
1983
- 1983-02-04 JP JP58017106A patent/JPS59142447A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192846A (en) * | 1981-05-15 | 1982-11-27 | Yamatake Honeywell Co Ltd | Humidity sensor and manufacture thereof |
| JPS58176538A (ja) * | 1982-04-09 | 1983-10-17 | Sharp Corp | 感湿抵抗素子 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61200454A (ja) * | 1985-03-01 | 1986-09-05 | Nok Corp | 薄膜感湿素子 |
| JPS61237044A (ja) * | 1985-04-12 | 1986-10-22 | Hamamatsu Photonics Kk | 湿度検出素子およびその製造方法 |
| JPS6347646A (ja) * | 1986-08-13 | 1988-02-29 | Nok Corp | 感湿素子 |
| JPS63177050A (ja) * | 1986-09-05 | 1988-07-21 | Nok Corp | 感湿素子 |
| JPS6395347A (ja) * | 1986-10-09 | 1988-04-26 | Nok Corp | 湿度センサ |
| JPH06307339A (ja) * | 1993-04-24 | 1994-11-01 | Samsung Electronics Co Ltd | 圧縮機の騒音減衰器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0415413B2 (enrdf_load_stackoverflow) | 1992-03-17 |
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