JPH0415413B2 - - Google Patents

Info

Publication number
JPH0415413B2
JPH0415413B2 JP58017106A JP1710683A JPH0415413B2 JP H0415413 B2 JPH0415413 B2 JP H0415413B2 JP 58017106 A JP58017106 A JP 58017106A JP 1710683 A JP1710683 A JP 1710683A JP H0415413 B2 JPH0415413 B2 JP H0415413B2
Authority
JP
Japan
Prior art keywords
humidity
sensor
plasma
polymer film
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58017106A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59142447A (ja
Inventor
Kunihiro Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP58017106A priority Critical patent/JPS59142447A/ja
Publication of JPS59142447A publication Critical patent/JPS59142447A/ja
Publication of JPH0415413B2 publication Critical patent/JPH0415413B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP58017106A 1983-02-04 1983-02-04 湿度センサーの製造方法 Granted JPS59142447A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58017106A JPS59142447A (ja) 1983-02-04 1983-02-04 湿度センサーの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58017106A JPS59142447A (ja) 1983-02-04 1983-02-04 湿度センサーの製造方法

Publications (2)

Publication Number Publication Date
JPS59142447A JPS59142447A (ja) 1984-08-15
JPH0415413B2 true JPH0415413B2 (enrdf_load_stackoverflow) 1992-03-17

Family

ID=11934773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58017106A Granted JPS59142447A (ja) 1983-02-04 1983-02-04 湿度センサーの製造方法

Country Status (1)

Country Link
JP (1) JPS59142447A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61200454A (ja) * 1985-03-01 1986-09-05 Nok Corp 薄膜感湿素子
JPS61237044A (ja) * 1985-04-12 1986-10-22 Hamamatsu Photonics Kk 湿度検出素子およびその製造方法
JPS6347646A (ja) * 1986-08-13 1988-02-29 Nok Corp 感湿素子
JP2518282B2 (ja) * 1986-09-05 1996-07-24 エヌオーケー株式会社 感湿素子
JPH0814553B2 (ja) * 1986-10-09 1996-02-14 エヌオーケー株式会社 湿度センサ
KR200141490Y1 (ko) * 1993-04-24 1999-05-15 김광호 압축기의소음감쇠장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4356150A (en) * 1981-05-15 1982-10-26 Honeywell Inc. Humidity sensor with electrical rejection of contaminants
JPS58176538A (ja) * 1982-04-09 1983-10-17 Sharp Corp 感湿抵抗素子

Also Published As

Publication number Publication date
JPS59142447A (ja) 1984-08-15

Similar Documents

Publication Publication Date Title
Aste et al. Microstructural development during the oxidation process in SnO2 thin films for gas sensors
Parker et al. Electrical Resistance‐Strain Characteristics of Thin Evaporated Metal Films
TW278187B (enrdf_load_stackoverflow)
Sberveglieri et al. A novel method for the preparation of nanosized TiO2 thin films
Golonka et al. Thick-film humidity sensors
JPH0415413B2 (enrdf_load_stackoverflow)
Biju et al. Effect of polyethylene glycol additive in sol on the humidity sensing properties of a TiO2 thin film
US4422129A (en) Humidity sensor
CN110849941B (zh) 一种基于疏松碳结构与亲水聚合物材料复合的电阻式湿度传感装置的制备方法
Mosca et al. Effect of humidity on the ac impedance of CH3NH3SnCl3 hybrid films
Anchisini et al. Polyphosphazene membrane as a very sensitive resistive and capacitive humidity sensor
Zor et al. QCM humidity sensors based on organic/inorganic nanocomposites of water soluble-conductive poly (diphenylamine sulfonic acid)
US3703697A (en) Relative humidity sensor
JPH08261979A (ja) センサー用電極
Blum et al. Molecular dynamics of poly (γ‐octadecyl‐co‐methyl‐l‐glutamate) in ultrathin films and in the bulk
Ayerdi et al. Ceramic pressure sensor based on tantalum thin film
Obraztsov et al. Active control of the catalyst structure during sputtering the on surface of solid oxide electrolytes of fuel cells
CN111044582A (zh) 一种氟碳膜/金属氧化物气敏膜复合叠层器件及其制备方法
Partridge et al. Plasma polymers applied to chemical sensing
CN114674881B (zh) Mems氧气传感器气敏薄膜及其制备方法
JP3170909B2 (ja) ガス検出素子の製造法
US5087480A (en) Method for manufacturing a moisture permeable electrode in a moisture sensor
Gasser et al. Instability of Amorphous Ru‐Si‐O Thin Films under Thermal Oxidation
KR100475743B1 (ko) R.F. 마그네트론 스퍼터링법을 이용한 In2O3 박막 오존가스센서 및 그 제조방법
Watson et al. The morphology of tin cluster assembled films and the effect of nitrogen