JPS59141812A - 薄膜圧電振動子 - Google Patents

薄膜圧電振動子

Info

Publication number
JPS59141812A
JPS59141812A JP1565083A JP1565083A JPS59141812A JP S59141812 A JPS59141812 A JP S59141812A JP 1565083 A JP1565083 A JP 1565083A JP 1565083 A JP1565083 A JP 1565083A JP S59141812 A JPS59141812 A JP S59141812A
Authority
JP
Japan
Prior art keywords
thin film
silicon
piezoelectric
silicon thin
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1565083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0568128B2 (enrdf_load_stackoverflow
Inventor
Yoichi Miyasaka
洋一 宮坂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1565083A priority Critical patent/JPS59141812A/ja
Publication of JPS59141812A publication Critical patent/JPS59141812A/ja
Publication of JPH0568128B2 publication Critical patent/JPH0568128B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP1565083A 1983-02-02 1983-02-02 薄膜圧電振動子 Granted JPS59141812A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1565083A JPS59141812A (ja) 1983-02-02 1983-02-02 薄膜圧電振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1565083A JPS59141812A (ja) 1983-02-02 1983-02-02 薄膜圧電振動子

Publications (2)

Publication Number Publication Date
JPS59141812A true JPS59141812A (ja) 1984-08-14
JPH0568128B2 JPH0568128B2 (enrdf_load_stackoverflow) 1993-09-28

Family

ID=11894590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1565083A Granted JPS59141812A (ja) 1983-02-02 1983-02-02 薄膜圧電振動子

Country Status (1)

Country Link
JP (1) JPS59141812A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100438467B1 (ko) * 1999-07-29 2004-07-03 루센트 테크놀러지스 인크 박막 공진기 장치 및 이의 제조 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58121817A (ja) * 1982-01-14 1983-07-20 Murata Mfg Co Ltd 圧電共振子

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58121817A (ja) * 1982-01-14 1983-07-20 Murata Mfg Co Ltd 圧電共振子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100438467B1 (ko) * 1999-07-29 2004-07-03 루센트 테크놀러지스 인크 박막 공진기 장치 및 이의 제조 방법

Also Published As

Publication number Publication date
JPH0568128B2 (enrdf_load_stackoverflow) 1993-09-28

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