JPH0568128B2 - - Google Patents

Info

Publication number
JPH0568128B2
JPH0568128B2 JP58015650A JP1565083A JPH0568128B2 JP H0568128 B2 JPH0568128 B2 JP H0568128B2 JP 58015650 A JP58015650 A JP 58015650A JP 1565083 A JP1565083 A JP 1565083A JP H0568128 B2 JPH0568128 B2 JP H0568128B2
Authority
JP
Japan
Prior art keywords
thin film
piezoelectric vibrator
silicon
piezoelectric
silicon thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58015650A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59141812A (ja
Inventor
Yoichi Myasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP1565083A priority Critical patent/JPS59141812A/ja
Publication of JPS59141812A publication Critical patent/JPS59141812A/ja
Publication of JPH0568128B2 publication Critical patent/JPH0568128B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP1565083A 1983-02-02 1983-02-02 薄膜圧電振動子 Granted JPS59141812A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1565083A JPS59141812A (ja) 1983-02-02 1983-02-02 薄膜圧電振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1565083A JPS59141812A (ja) 1983-02-02 1983-02-02 薄膜圧電振動子

Publications (2)

Publication Number Publication Date
JPS59141812A JPS59141812A (ja) 1984-08-14
JPH0568128B2 true JPH0568128B2 (enrdf_load_stackoverflow) 1993-09-28

Family

ID=11894590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1565083A Granted JPS59141812A (ja) 1983-02-02 1983-02-02 薄膜圧電振動子

Country Status (1)

Country Link
JP (1) JPS59141812A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6349454B1 (en) * 1999-07-29 2002-02-26 Agere Systems Guardian Corp. Method of making thin film resonator apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58121817A (ja) * 1982-01-14 1983-07-20 Murata Mfg Co Ltd 圧電共振子

Also Published As

Publication number Publication date
JPS59141812A (ja) 1984-08-14

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