JPS59136479A - 複合層を生長させる方法 - Google Patents
複合層を生長させる方法Info
- Publication number
- JPS59136479A JPS59136479A JP58189415A JP18941583A JPS59136479A JP S59136479 A JPS59136479 A JP S59136479A JP 58189415 A JP58189415 A JP 58189415A JP 18941583 A JP18941583 A JP 18941583A JP S59136479 A JPS59136479 A JP S59136479A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- layer
- chamber
- glow discharge
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 24
- 239000002131 composite material Substances 0.000 title claims description 4
- 239000000463 material Substances 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 42
- 239000004215 Carbon black (E152) Substances 0.000 claims description 7
- 229930195733 hydrocarbon Natural products 0.000 claims description 7
- 150000002430 hydrocarbons Chemical class 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 150000002500 ions Chemical class 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 27
- 239000007789 gas Substances 0.000 description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 238000000576 coating method Methods 0.000 description 12
- 229910052799 carbon Inorganic materials 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 10
- -1 Carbon ions Chemical class 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000001273 butane Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 5
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 229910000078 germane Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/027—Graded interfaces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB8229125 | 1982-10-12 | ||
| GB8229125 | 1982-10-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59136479A true JPS59136479A (ja) | 1984-08-06 |
| JPH0512432B2 JPH0512432B2 (enExample) | 1993-02-18 |
Family
ID=10533550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58189415A Granted JPS59136479A (ja) | 1982-10-12 | 1983-10-12 | 複合層を生長させる方法 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0106638A1 (enExample) |
| JP (1) | JPS59136479A (enExample) |
| GB (1) | GB2132636B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2165266B (en) * | 1982-10-12 | 1987-09-23 | Nat Res Dev | Infra red transparent optical components |
| EP0209972A1 (en) * | 1985-06-05 | 1987-01-28 | Plessey Overseas Limited | Methods of depositing germanium hydrogen carbide |
| DE3664791D1 (en) * | 1985-06-05 | 1989-09-07 | Plessey Overseas | Methods of depositing germanium carbide |
| CH671407A5 (enExample) * | 1986-06-13 | 1989-08-31 | Balzers Hochvakuum | |
| EP0285745B1 (de) * | 1987-03-06 | 1993-05-26 | Balzers Aktiengesellschaft | Verfahren und Vorrichtungen zum Vakuumbeschichten mittels einer elektrischen Bogenentladung |
| GB8713922D0 (en) * | 1987-06-15 | 1994-06-22 | Secr Defence | Infra red transparent windows |
| WO1993008316A1 (fr) * | 1991-10-14 | 1993-04-29 | Commissariat A L'energie Atomique | Materiau multicouche pour revetement anti-erosion et anti-abrasion |
| FR2682400A1 (fr) * | 1991-10-14 | 1993-04-16 | Commissariat Energie Atomique | Materiau multicouche, procedes de fabrication de ce materiau multicouche et de l'une des couches de ce materiau et revetement anti-erosion et anti-abrasion comprenant ce materiau multicouche. |
| US5702829A (en) * | 1991-10-14 | 1997-12-30 | Commissariat A L'energie Atomique | Multilayer material, anti-erosion and anti-abrasion coating incorporating said multilayer material |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321902A (en) * | 1976-08-11 | 1978-02-28 | Fujitsu Ltd | Formation of carbonized protective film for magnetic recording medium |
| JPS5726164A (en) * | 1980-07-14 | 1982-02-12 | Uni Shidonii Za | Method and apparatus for reactively spattering surface coating with gradient on substrate |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL6507670A (enExample) * | 1964-06-30 | 1965-12-31 | ||
| US3979271A (en) * | 1973-07-23 | 1976-09-07 | Westinghouse Electric Corporation | Deposition of solid semiconductor compositions and novel semiconductor materials |
| US4013532A (en) * | 1975-03-03 | 1977-03-22 | Airco, Inc. | Method for coating a substrate |
| US4068037A (en) * | 1976-01-02 | 1978-01-10 | Avco Corporation | Silicon carbide filaments and method |
| AU507748B2 (en) * | 1976-06-10 | 1980-02-28 | University Of Sydney, The | Reactive sputtering |
| FR2393854A1 (fr) * | 1977-06-07 | 1979-01-05 | Michel Gantois | Procede de recouvrement de la surface d'une piece conductrice de l'electricite |
| GB2050433A (en) * | 1979-06-04 | 1981-01-07 | Ultra Electronic Controls Ltd | Sputter coating objects with a compound of a transition metal |
| DE3064976D1 (en) * | 1979-11-20 | 1983-10-27 | Nat Res Dev | Infra red reflectors |
| EP0032788B2 (en) * | 1980-01-16 | 1989-12-06 | National Research Development Corporation | Method for depositing coatings in a glow discharge |
| US4702960A (en) * | 1980-07-30 | 1987-10-27 | Avco Corporation | Surface treatment for carbon and product |
| GB2083841B (en) * | 1980-08-21 | 1985-03-13 | Secr Defence | Glow discharge coating |
| GB2082562B (en) * | 1980-08-21 | 1983-12-14 | Secr Defence | Coating germanium of silicon with carbon |
-
1983
- 1983-10-06 EP EP83306058A patent/EP0106638A1/en not_active Withdrawn
- 1983-10-10 GB GB08327063A patent/GB2132636B/en not_active Expired
- 1983-10-12 JP JP58189415A patent/JPS59136479A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321902A (en) * | 1976-08-11 | 1978-02-28 | Fujitsu Ltd | Formation of carbonized protective film for magnetic recording medium |
| JPS5726164A (en) * | 1980-07-14 | 1982-02-12 | Uni Shidonii Za | Method and apparatus for reactively spattering surface coating with gradient on substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0106638A1 (en) | 1984-04-25 |
| GB2132636A (en) | 1984-07-11 |
| GB2132636B (en) | 1986-03-26 |
| JPH0512432B2 (enExample) | 1993-02-18 |
| GB8327063D0 (en) | 1983-11-09 |
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