JPS5726164A - Method and apparatus for reactively spattering surface coating with gradient on substrate - Google Patents

Method and apparatus for reactively spattering surface coating with gradient on substrate

Info

Publication number
JPS5726164A
JPS5726164A JP9613980A JP9613980A JPS5726164A JP S5726164 A JPS5726164 A JP S5726164A JP 9613980 A JP9613980 A JP 9613980A JP 9613980 A JP9613980 A JP 9613980A JP S5726164 A JPS5726164 A JP S5726164A
Authority
JP
Japan
Prior art keywords
reactively
gradient
substrate
surface coating
spattering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9613980A
Other languages
Japanese (ja)
Other versions
JPS6047905B2 (en
Inventor
Resutaa Haadeingu Jiyofurii
Robaato Matsukenjii Debuitsudo
Uindou Buraian
Richiyaado Korinzu Ansonii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UNI SHIDONII ZA
Original Assignee
UNI SHIDONII ZA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UNI SHIDONII ZA filed Critical UNI SHIDONII ZA
Priority to JP9613980A priority Critical patent/JPS6047905B2/en
Publication of JPS5726164A publication Critical patent/JPS5726164A/en
Publication of JPS6047905B2 publication Critical patent/JPS6047905B2/en
Expired legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/40—Solar thermal energy, e.g. solar towers

Landscapes

  • Physical Vapour Deposition (AREA)
JP9613980A 1980-07-14 1980-07-14 Method and apparatus for reactively sputtering a graded surface coating onto a substrate Expired JPS6047905B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9613980A JPS6047905B2 (en) 1980-07-14 1980-07-14 Method and apparatus for reactively sputtering a graded surface coating onto a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9613980A JPS6047905B2 (en) 1980-07-14 1980-07-14 Method and apparatus for reactively sputtering a graded surface coating onto a substrate

Publications (2)

Publication Number Publication Date
JPS5726164A true JPS5726164A (en) 1982-02-12
JPS6047905B2 JPS6047905B2 (en) 1985-10-24

Family

ID=14157051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9613980A Expired JPS6047905B2 (en) 1980-07-14 1980-07-14 Method and apparatus for reactively sputtering a graded surface coating onto a substrate

Country Status (1)

Country Link
JP (1) JPS6047905B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136479A (en) * 1982-10-12 1984-08-06 イギリス国 Composite layer growing process
JPS60165788A (en) * 1984-02-07 1985-08-28 住友特殊金属株式会社 Method of forming a1203
JP2014510839A (en) * 2011-02-22 2014-05-01 サボ−ソーラー オサケユイチア Method of manufacturing a heat absorber for a solar collector

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136479A (en) * 1982-10-12 1984-08-06 イギリス国 Composite layer growing process
JPH0512432B2 (en) * 1982-10-12 1993-02-18 Secr Defence Brit
JPS60165788A (en) * 1984-02-07 1985-08-28 住友特殊金属株式会社 Method of forming a1203
JPH0422983B2 (en) * 1984-02-07 1992-04-21 Sumitomo Spec Metals
JP2014510839A (en) * 2011-02-22 2014-05-01 サボ−ソーラー オサケユイチア Method of manufacturing a heat absorber for a solar collector

Also Published As

Publication number Publication date
JPS6047905B2 (en) 1985-10-24

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