JPS5913352Y2 - 真空系装置用キヤンドモ−タポンプ - Google Patents

真空系装置用キヤンドモ−タポンプ

Info

Publication number
JPS5913352Y2
JPS5913352Y2 JP373079U JP373079U JPS5913352Y2 JP S5913352 Y2 JPS5913352 Y2 JP S5913352Y2 JP 373079 U JP373079 U JP 373079U JP 373079 U JP373079 U JP 373079U JP S5913352 Y2 JPS5913352 Y2 JP S5913352Y2
Authority
JP
Japan
Prior art keywords
pump
canned motor
auxiliary
main pump
auxiliary pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP373079U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55104791U (enrdf_load_stackoverflow
Inventor
光弘 玉山
Original Assignee
株式会社帝国電機製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社帝国電機製作所 filed Critical 株式会社帝国電機製作所
Priority to JP373079U priority Critical patent/JPS5913352Y2/ja
Publication of JPS55104791U publication Critical patent/JPS55104791U/ja
Application granted granted Critical
Publication of JPS5913352Y2 publication Critical patent/JPS5913352Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
JP373079U 1979-01-16 1979-01-16 真空系装置用キヤンドモ−タポンプ Expired JPS5913352Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP373079U JPS5913352Y2 (ja) 1979-01-16 1979-01-16 真空系装置用キヤンドモ−タポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP373079U JPS5913352Y2 (ja) 1979-01-16 1979-01-16 真空系装置用キヤンドモ−タポンプ

Publications (2)

Publication Number Publication Date
JPS55104791U JPS55104791U (enrdf_load_stackoverflow) 1980-07-22
JPS5913352Y2 true JPS5913352Y2 (ja) 1984-04-20

Family

ID=28807988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP373079U Expired JPS5913352Y2 (ja) 1979-01-16 1979-01-16 真空系装置用キヤンドモ−タポンプ

Country Status (1)

Country Link
JP (1) JPS5913352Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH064074Y2 (ja) * 1986-09-22 1994-02-02 日機装株式会社 耐異物用キヤンドモ−タポンプ
JP2882325B2 (ja) * 1995-11-14 1999-04-12 日本電気株式会社 マグネットポンプ

Also Published As

Publication number Publication date
JPS55104791U (enrdf_load_stackoverflow) 1980-07-22

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