JPS59132671A - 縦型ｍｏｓトランジスタ - Google Patents

縦型ｍｏｓトランジスタ

Info

Publication number
JPS59132671A
JPS59132671A JP58006912A JP691283A JPS59132671A JP S59132671 A JPS59132671 A JP S59132671A JP 58006912 A JP58006912 A JP 58006912A JP 691283 A JP691283 A JP 691283A JP S59132671 A JPS59132671 A JP S59132671A
Authority
JP
Japan
Prior art keywords
region
type
conductivity type
concentration
breakdown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58006912A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0376592B2 (enExample
Inventor
Shigeo Hoshino
重夫 星野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP58006912A priority Critical patent/JPS59132671A/ja
Publication of JPS59132671A publication Critical patent/JPS59132671A/ja
Publication of JPH0376592B2 publication Critical patent/JPH0376592B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149—Source or drain regions of field-effect devices
    • H10D62/151—Source or drain regions of field-effect devices of IGFETs 
    • H10D62/156—Drain regions of DMOS transistors
    • H10D62/157—Impurity concentrations or distributions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H10D30/662—Vertical DMOS [VDMOS] FETs having a drift region having a doping concentration that is higher between adjacent body regions relative to other parts of the drift region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13—Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/149—Source or drain regions of field-effect devices
    • H10D62/151—Source or drain regions of field-effect devices of IGFETs 
JP58006912A 1983-01-19 1983-01-19 縦型ｍｏｓトランジスタ Granted JPS59132671A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58006912A JPS59132671A (ja) 1983-01-19 1983-01-19 縦型ｍｏｓトランジスタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58006912A JPS59132671A (ja) 1983-01-19 1983-01-19 縦型ｍｏｓトランジスタ

Publications (2)

Publication Number Publication Date
JPS59132671A true JPS59132671A (ja) 1984-07-30
JPH0376592B2 JPH0376592B2 (enExample) 1991-12-05

Family

ID=11651445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58006912A Granted JPS59132671A (ja) 1983-01-19 1983-01-19 縦型ｍｏｓトランジスタ

Country Status (1)

Country Link
JP (1) JPS59132671A (enExample)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0445323A1 (en) * 1988-09-07 1991-09-11 Kabushiki Kaisha Toshiba Field effect semiconductor device having current paths formed in conductive layer of semiconductor substrate
JPH04276663A (ja) * 1991-03-05 1992-10-01 Nec Yamagata Ltd 半導体装置
JPH08250731A (ja) * 1994-12-30 1996-09-27 Siliconix Inc 高いブレークダウン電圧と低いオン抵抗を兼ね備えたトレンチ型ｍｏｓｆｅｔ
WO1996032749A1 (en) * 1995-04-11 1996-10-17 Rohm Co., Ltd. Semiconductor device having planar type high withstand voltage vertical devices, and production method thereof
JP2000507394A (ja) * 1996-03-27 2000-06-13 エービービー リサーチ リミテッド ＳｉＣの電界制御型半導体デバイスおよびその生産方法
US6384431B1 (en) 1999-10-08 2002-05-07 Denso Corporation Insulated gate bipolar transistor
US6465839B2 (en) 2000-04-07 2002-10-15 Denso Corporation Semiconductor device having lateral MOSFET (LDMOS)
JP2019125621A (ja) * 2018-01-12 2019-07-25 トヨタ自動車株式会社 半導体装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0445323A1 (en) * 1988-09-07 1991-09-11 Kabushiki Kaisha Toshiba Field effect semiconductor device having current paths formed in conductive layer of semiconductor substrate
JPH04276663A (ja) * 1991-03-05 1992-10-01 Nec Yamagata Ltd 半導体装置
JPH08250731A (ja) * 1994-12-30 1996-09-27 Siliconix Inc 高いブレークダウン電圧と低いオン抵抗を兼ね備えたトレンチ型ｍｏｓｆｅｔ
WO1996032749A1 (en) * 1995-04-11 1996-10-17 Rohm Co., Ltd. Semiconductor device having planar type high withstand voltage vertical devices, and production method thereof
JP2000507394A (ja) * 1996-03-27 2000-06-13 エービービー リサーチ リミテッド ＳｉＣの電界制御型半導体デバイスおよびその生産方法
US6384431B1 (en) 1999-10-08 2002-05-07 Denso Corporation Insulated gate bipolar transistor
US6465839B2 (en) 2000-04-07 2002-10-15 Denso Corporation Semiconductor device having lateral MOSFET (LDMOS)
US6573144B2 (en) 2000-04-07 2003-06-03 Shigeki Takahashi Method for manufacturing a semiconductor device having lateral MOSFET (LDMOS)
JP2019125621A (ja) * 2018-01-12 2019-07-25 トヨタ自動車株式会社 半導体装置

Also Published As

Publication number Publication date
JPH0376592B2 (enExample) 1991-12-05

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