JPS59126193U - 真空排気装置 - Google Patents

真空排気装置

Info

Publication number
JPS59126193U
JPS59126193U JP1991283U JP1991283U JPS59126193U JP S59126193 U JPS59126193 U JP S59126193U JP 1991283 U JP1991283 U JP 1991283U JP 1991283 U JP1991283 U JP 1991283U JP S59126193 U JPS59126193 U JP S59126193U
Authority
JP
Japan
Prior art keywords
vacuum exhaust
exhaust equipment
interposed
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1991283U
Other languages
English (en)
Japanese (ja)
Other versions
JPH029112Y2 (enrdf_load_stackoverflow
Inventor
順司 高田
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP1991283U priority Critical patent/JPS59126193U/ja
Publication of JPS59126193U publication Critical patent/JPS59126193U/ja
Application granted granted Critical
Publication of JPH029112Y2 publication Critical patent/JPH029112Y2/ja
Granted legal-status Critical Current

Links

JP1991283U 1983-02-14 1983-02-14 真空排気装置 Granted JPS59126193U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991283U JPS59126193U (ja) 1983-02-14 1983-02-14 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1991283U JPS59126193U (ja) 1983-02-14 1983-02-14 真空排気装置

Publications (2)

Publication Number Publication Date
JPS59126193U true JPS59126193U (ja) 1984-08-24
JPH029112Y2 JPH029112Y2 (enrdf_load_stackoverflow) 1990-03-06

Family

ID=30151050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991283U Granted JPS59126193U (ja) 1983-02-14 1983-02-14 真空排気装置

Country Status (1)

Country Link
JP (1) JPS59126193U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02140490A (ja) * 1988-11-22 1990-05-30 Shibaura Eng Works Co Ltd 圧力制御機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02140490A (ja) * 1988-11-22 1990-05-30 Shibaura Eng Works Co Ltd 圧力制御機構

Also Published As

Publication number Publication date
JPH029112Y2 (enrdf_load_stackoverflow) 1990-03-06

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