JPS59124771A - 化合物半導体装置 - Google Patents
化合物半導体装置Info
- Publication number
- JPS59124771A JPS59124771A JP57233818A JP23381882A JPS59124771A JP S59124771 A JPS59124771 A JP S59124771A JP 57233818 A JP57233818 A JP 57233818A JP 23381882 A JP23381882 A JP 23381882A JP S59124771 A JPS59124771 A JP S59124771A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- type
- semiconductor device
- gaas
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
- H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
- H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
- H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
- H10D30/4755—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs having wide bandgap charge-carrier supplying layers, e.g. modulation doped HEMTs such as n-AlGaAs/GaAs HEMTs
Landscapes
- Bipolar Transistors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57233818A JPS59124771A (ja) | 1982-12-30 | 1982-12-30 | 化合物半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57233818A JPS59124771A (ja) | 1982-12-30 | 1982-12-30 | 化合物半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59124771A true JPS59124771A (ja) | 1984-07-18 |
| JPS6359268B2 JPS6359268B2 (enExample) | 1988-11-18 |
Family
ID=16961046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57233818A Granted JPS59124771A (ja) | 1982-12-30 | 1982-12-30 | 化合物半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59124771A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4745448A (en) * | 1985-12-24 | 1988-05-17 | Raytheon Company | Semiconductor devices having compensated buffer layers |
| JPS6449276A (en) * | 1987-08-20 | 1989-02-23 | Fujitsu Ltd | Semiconductor device |
| JPH01199475A (ja) * | 1988-02-03 | 1989-08-10 | Sanyo Electric Co Ltd | ヘテロ接合電界効果トランジスタ |
| EP0308969A3 (en) * | 1987-09-25 | 1989-10-18 | Siemens Aktiengesellschaft | High electron mobility transistor structure |
| JP2005191449A (ja) * | 2003-12-26 | 2005-07-14 | Matsushita Electric Ind Co Ltd | 電界効果トランジスタ |
-
1982
- 1982-12-30 JP JP57233818A patent/JPS59124771A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4745448A (en) * | 1985-12-24 | 1988-05-17 | Raytheon Company | Semiconductor devices having compensated buffer layers |
| JPS6449276A (en) * | 1987-08-20 | 1989-02-23 | Fujitsu Ltd | Semiconductor device |
| EP0308969A3 (en) * | 1987-09-25 | 1989-10-18 | Siemens Aktiengesellschaft | High electron mobility transistor structure |
| JPH01199475A (ja) * | 1988-02-03 | 1989-08-10 | Sanyo Electric Co Ltd | ヘテロ接合電界効果トランジスタ |
| JP2005191449A (ja) * | 2003-12-26 | 2005-07-14 | Matsushita Electric Ind Co Ltd | 電界効果トランジスタ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6359268B2 (enExample) | 1988-11-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Kim et al. | Single-electron transistors operating at room temperature, fabricated utilizing nanocrystals created by focused-ion beam | |
| JPH0434301B2 (enExample) | ||
| JPS6127661A (ja) | 導電性薄層の形成方法 | |
| JP2780845B2 (ja) | 能動型半導体構造の製造方法及び能動型半導体構造を有する電界効果トランジスタ | |
| Fowell et al. | The Au/CdTe interface: an investigation of electrical barriers by ballistic electron emission microscopy | |
| JPS59124771A (ja) | 化合物半導体装置 | |
| JPH03296284A (ja) | 超伝導素子の製造方法 | |
| JP3119248B2 (ja) | 電界効果トランジスタおよびその製造方法 | |
| JPS6031909B2 (ja) | エツチング加工法 | |
| JPS58197825A (ja) | 半導体保護層形成方法 | |
| CA1271850A (en) | Method for fabricating a field-effect transistor with a self-aligned gate | |
| US5483089A (en) | Electrically isolated MESFET | |
| JP2803555B2 (ja) | 極微細トンネル障壁の作製方法 | |
| JPH02189978A (ja) | 細線電界効果トランジスタ及びその製造方法 | |
| EP0561580A2 (en) | Charge carrier flow control device | |
| JPS5955072A (ja) | 半導体装置の製造方法 | |
| JPS61116877A (ja) | 電界効果トランジスタの製造方法 | |
| JPH01189968A (ja) | 量子干渉型トランジスタ | |
| JPS5847714Y2 (ja) | シヨツトキ障壁型電界効果トランジスタ | |
| JPS62274675A (ja) | 電界効果トランジスタの製造方法 | |
| JP3263869B2 (ja) | 共鳴トンネル型ホットエレクトロントランジスタ | |
| JPS6273711A (ja) | 半導体装置 | |
| JPS6240771A (ja) | 半導体装置 | |
| EP0364762A1 (en) | Semiconductor device with optimum interlayer distance | |
| JPS61121359A (ja) | 高速半導体装置の製造方法 |