JPS59122209U - 切断機 - Google Patents

切断機

Info

Publication number
JPS59122209U
JPS59122209U JP1983017070U JP1707083U JPS59122209U JP S59122209 U JPS59122209 U JP S59122209U JP 1983017070 U JP1983017070 U JP 1983017070U JP 1707083 U JP1707083 U JP 1707083U JP S59122209 U JPS59122209 U JP S59122209U
Authority
JP
Japan
Prior art keywords
cutting
cutting machine
cutting wheel
model registration
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1983017070U
Other languages
English (en)
Inventor
小野　喬利
Original Assignee
株式会社デイスコ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社デイスコ filed Critical 株式会社デイスコ
Priority to JP1983017070U priority Critical patent/JPS59122209U/ja
Priority to US06/574,814 priority patent/US4558686A/en
Priority to DE3404257A priority patent/DE3404257A1/de
Publication of JPS59122209U publication Critical patent/JPS59122209U/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0042—Devices for removing chips
    • B23Q11/005—Devices for removing chips by blowing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
    • B23Q17/0952—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining
    • B23Q17/0957—Detection of tool breakage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0683—Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は、切削砥石が不適切な状態になった一例を示す
斜視図。第２図は、本考案に従って構成された切断機の
一具体例を示す簡略側面図。 １０・・・・・・回転軸、１１・・・・・・切削砥石、
１４・・量検出ヘッド（切削砥石監視手段）、１４ａ・
曲・光ファイバ（切削砥石監視手段）、１５・・曲監視
ユニット（切削砥石監視手段）。

Claims (1)

  1. 【実用新案登録請求の範囲】 支持台に軸支された駆動軸に装着されて回転しウェーハ
    を切断する切削砥石を有する切断機において、該切削砥
    石の刃体部側面に対向す２よう反射センサーを適宜配設
    して成り、該反射センサーから一定量の反射波を発受信
    し、その受信波数値によって前記刃体部の損傷を検索す
    るよう構成して成ることを特徴とする切断機。 図面の簡単な説明　　　　　　　　　　　　　　　　−
    １゜第１図は切削砥石の斜視図、第２図はこの考案の切
    断機要部側面図。 ４・・・切断機、５・・・支持台、６・・・支台、７・
    ・・駆動部、８・・・ウェーハバキュームチャックテー
    ブル、９・・・ウェーハ、１０・・・駆動軸、１１・・
    ・切削砥石、１１ａ・・・刃体部、１２・・・フランジ
    、１３・・・センサー支持体、１４・・・反射センサー
    、１４ａ・・・光ファイバー、１５・・・計器部、１６
    ・・・注水管。 補正　昭５９．　５．　７ 実用新案登録請求の範囲、図面の簡単な説明を次のよう
    に補正する。 Ｏ実用新案登録請求の範囲 １　回転駆動される回転軸に装着された切削砥石を具備
    する切断機において；電磁波発信手段及び電磁波受信手
    段を含む切削−石監視手段が設けられており、該発信手
    段から発信された電磁波が該切削砥石によって干渉され
    、該受信手段が受信する電磁波が該切削砥石の状態変化
    に応じて変化せしめられる、 ことを特徴とする切断機。 ２　該受信手段は該切断砥石に反射された電磁波を受信
    する、実用新案登録請求の範囲第１項記載の切断機。 ３　該電磁波は光である、実用新案登録請求の範囲第１
    項又は第２項記載の切断機。
JP1983017070U 1983-02-07 1983-02-07 切断機 Pending JPS59122209U (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1983017070U JPS59122209U (ja) 1983-02-07 1983-02-07 切断機
US06/574,814 US4558686A (en) 1983-02-07 1984-01-30 Machining device equipped with blade inspecting means
DE3404257A DE3404257A1 (de) 1983-02-07 1984-02-07 Bearbeitungseinrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983017070U JPS59122209U (ja) 1983-02-07 1983-02-07 切断機

Publications (1)

Publication Number Publication Date
JPS59122209U true JPS59122209U (ja) 1984-08-17

Family

ID=11933719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983017070U Pending JPS59122209U (ja) 1983-02-07 1983-02-07 切断機

Country Status (3)

Country Link
US (1) US4558686A (ja)
JP (1) JPS59122209U (ja)
DE (1) DE3404257A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016062941A (ja) * 2014-09-16 2016-04-25 株式会社ディスコ 板状被加工物の分割方法

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DE3536129A1 (de) * 1985-10-10 1987-04-16 Winter & Sohn Ernst Verfahren und anordnung zur steuerung des antriebes verschiedenartiger nacheinander zum einsatz kommender schleifscheiben
DE3725652A1 (de) * 1987-08-03 1989-02-16 Kadia Diamant Werkzeug zur spanabhebenden bearbeitung
DE68919373T2 (de) * 1988-02-15 1995-03-30 Tokyo Seimitsu Co Ltd Verfahren und Vorrichtung für die Nachbearbeitung auf Innenlochfeinbearbeitungsmaschinen.
DE3805164A1 (de) * 1988-02-19 1989-08-31 Krupp Gmbh Schneidvorrichtung fuer harzmatten
FR2642693B1 (fr) * 1989-02-08 1991-04-19 Hispano Suiza Sa Procede d'usinage par rectification comportant des mesures d'une meule de forme et machine le mettant en oeuvre
US5076021A (en) * 1989-04-28 1991-12-31 Silicon Technology Corporation Flat grind stage assembly for an automatic edge grinder
US5031360A (en) * 1989-08-29 1991-07-16 Micron Technology, Inc. Broken blade detector for semiconductor die saws
US5070655A (en) * 1990-11-30 1991-12-10 Aggarwal Trilok R Machining process monitor
DE69205786T2 (de) * 1991-08-21 1996-03-28 Tokyo Seimitsu Co Ltd Blattpositiondetektionsvorrichtung.
JPH0653696U (ja) * 1992-12-18 1994-07-22 株式会社小松製作所 シールド掘進機のカッタビット摩耗検知装置
KR100225909B1 (ko) * 1997-05-29 1999-10-15 윤종용 웨이퍼 소잉 장치
DE19811459C1 (de) * 1998-03-17 1999-10-28 Walter Ag Messvorrichtung für Sägeblätter
JP4590058B2 (ja) * 2000-04-12 2010-12-01 株式会社ディスコ 切削装置の切削ブレード検出機構
JP2002343746A (ja) * 2001-05-14 2002-11-29 Tokyo Seimitsu Co Ltd インターロック付ダイシング装置
US8424435B2 (en) * 2007-04-10 2013-04-23 Acco Brands Usa Llc Sheet trimmer with indicator to display usable life status of blade or blade opposing member
US8231435B2 (en) * 2008-06-16 2012-07-31 Donald Nevin Sanitizing dental model trimmer
JP6101140B2 (ja) * 2013-04-18 2017-03-22 株式会社ディスコ 切削装置
JP6974087B2 (ja) * 2017-09-14 2021-12-01 株式会社ディスコ 切削装置
US11635750B2 (en) 2019-10-30 2023-04-25 General Electric Company System and method for removably inserting a sensor assembly into a compressor casing
US11060847B2 (en) * 2019-10-30 2021-07-13 General Electric Company System and method for optical measurements in a rotary machine
US11400527B2 (en) 2019-10-30 2022-08-02 General Electric Company System and method for machining a slot in an inner surface of a casing for a gas turbine engine
US11409022B2 (en) 2019-10-30 2022-08-09 General Electric Company System and method for optical measurements in a rotary machine

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2340547A (en) * 1940-08-09 1944-02-01 Mikami Shinkuro Safety device for machine tools
US3250043A (en) * 1963-08-27 1966-05-10 Finkl & Sons Co Fail-safe speed control system for abrasive wheels
US3560826A (en) * 1967-12-04 1971-02-02 Gray Tech Ind Inc Grinding wheel control system and apparatus
US3835591A (en) * 1973-05-14 1974-09-17 Goodrich Co B F Method and apparatus for correcting dimensional variation in a rotating tire
JPS6112373B2 (ja) * 1974-09-04 1986-04-08 Hitachi Ltd
JPS52119586A (en) * 1976-03-31 1977-10-07 Agency Of Ind Science & Technol Method of detecting damage in tool optically
US4340326A (en) * 1980-02-25 1982-07-20 Cooper Industries, Inc. Broken bit detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016062941A (ja) * 2014-09-16 2016-04-25 株式会社ディスコ 板状被加工物の分割方法

Also Published As

Publication number Publication date
US4558686A (en) 1985-12-17
DE3404257A1 (de) 1984-08-09

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