DE68919373T2 - Verfahren und Vorrichtung für die Nachbearbeitung auf Innenlochfeinbearbeitungsmaschinen. - Google Patents

Verfahren und Vorrichtung für die Nachbearbeitung auf Innenlochfeinbearbeitungsmaschinen.

Info

Publication number
DE68919373T2
DE68919373T2 DE68919373T DE68919373T DE68919373T2 DE 68919373 T2 DE68919373 T2 DE 68919373T2 DE 68919373 T DE68919373 T DE 68919373T DE 68919373 T DE68919373 T DE 68919373T DE 68919373 T2 DE68919373 T2 DE 68919373T2
Authority
DE
Germany
Prior art keywords
post
processing
internal hole
finishing machines
hole finishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68919373T
Other languages
English (en)
Other versions
DE68919373D1 (de
Inventor
Katsuo Honda
Masato Inamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3208788A external-priority patent/JPH01210267A/ja
Priority claimed from JP12929988A external-priority patent/JP2610484B2/ja
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Application granted granted Critical
Publication of DE68919373D1 publication Critical patent/DE68919373D1/de
Publication of DE68919373T2 publication Critical patent/DE68919373T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D59/00—Accessories specially designed for sawing machines or sawing devices
    • B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D63/00—Dressing the tools of sawing machines or sawing devices for use in cutting any kind of material, e.g. in the manufacture of sawing tools
    • B23D63/08—Sharpening the cutting edges of saw teeth
    • B23D63/12—Sharpening the cutting edges of saw teeth by grinding
    • B23D63/14—Sharpening circular saw blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B3/00—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools
    • B24B3/36—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools of cutting blades
    • B24B3/46—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools of cutting blades of disc blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/02—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work
    • B24B5/16—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding peculiarly surfaces, e.g. bulged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
DE68919373T 1988-02-15 1989-02-14 Verfahren und Vorrichtung für die Nachbearbeitung auf Innenlochfeinbearbeitungsmaschinen. Expired - Fee Related DE68919373T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3208788A JPH01210267A (ja) 1988-02-15 1988-02-15 内周刃のドレッシング装置
JP12929988A JP2610484B2 (ja) 1988-05-26 1988-05-26 自動ドレッシング装置

Publications (2)

Publication Number Publication Date
DE68919373D1 DE68919373D1 (de) 1994-12-22
DE68919373T2 true DE68919373T2 (de) 1995-03-30

Family

ID=26370601

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68919373T Expired - Fee Related DE68919373T2 (de) 1988-02-15 1989-02-14 Verfahren und Vorrichtung für die Nachbearbeitung auf Innenlochfeinbearbeitungsmaschinen.

Country Status (4)

Country Link
US (1) US5000156A (de)
EP (1) EP0329087B1 (de)
KR (1) KR930007570B1 (de)
DE (1) DE68919373T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0767692B2 (ja) * 1989-09-07 1995-07-26 株式会社東京精密 スライシングマシンの切断方法
DE3941038A1 (de) * 1989-12-12 1991-06-13 Wacker Chemitronic Vorrichtung zum nachschaerfen der schneidkante von trennwerkzeugen beim abtrennen von scheiben von stab- oder blockfoermigen werkstuecken, insbesondere aus halbleitermaterial, ihre verwendung und saegeverfahren
JPH04122608A (ja) * 1990-09-14 1992-04-23 Shin Etsu Handotai Co Ltd 内周刃スライサーによる単結晶インゴットの切断方法及び装置
KR0185234B1 (ko) * 1991-11-28 1999-04-15 가부시키 가이샤 토쿄 세이미쯔 반도체 웨이퍼의 모떼기 방법
JP2628424B2 (ja) * 1992-01-24 1997-07-09 信越半導体株式会社 ウエーハ面取部の研磨方法及び装置
JPH07323420A (ja) * 1994-06-02 1995-12-12 Tokyo Seimitsu Co Ltd ウェーハ製造方法及びその装置
US6015335A (en) * 1997-12-17 2000-01-18 Memc Electronic Materials, Inc. Apparatus for dressing inside diameter saws
GB2335620B (en) * 1998-03-25 2003-03-19 Unova Uk Ltd Improvements in and relating to grinding machines
EP0945216A3 (de) * 1998-03-25 2002-07-17 Unova U.K. Limited Kerben-Schleifwerkzeug
US20050267470A1 (en) * 2004-05-13 2005-12-01 Mcbride Duncan Q Spinal stabilization system to flexibly connect vertebrae
CN105216130B (zh) 2014-06-24 2019-04-19 恩智浦美国有限公司 用于半导体切单锯的清洁装置
CN108747823B (zh) * 2018-06-19 2020-08-11 湖南镭盛机电科技有限公司 一种自动复合砂轮修整机
CN113414676B (zh) * 2021-08-20 2021-10-26 江苏苏爱尔电力设备有限公司 一种工业电机转子风扇打磨机械

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2897638A (en) * 1956-06-13 1959-08-04 Bryant Chucking Grinder Co Process control apparatus
US3039235A (en) * 1961-01-31 1962-06-19 Hamco Mach & Elect Co Cutting apparatus
US3154990A (en) * 1962-03-16 1964-11-03 Sylvania Electric Prod Slicing apparatus having a rotary internal peripheral faced saw blade
US3577861A (en) * 1969-04-07 1971-05-11 Kayex Corp Transfer device for cutting apparatus
US3662733A (en) * 1969-10-12 1972-05-16 Yoji Hattori Annular cutting apparatus with work removal means
PL92571B1 (en) * 1973-04-24 1977-04-30 Nehezipari Muszaki Egyetemhu Grinding machine for machining polygonal workpieces[US3886693A]
SU544542A2 (ru) * 1976-01-19 1977-01-30 Центральный Научно-Исследовательский И Конструкторский Институт Топливной Аппаратуры Автотракторных И Стационарных Двигателей Устройство дл правки шлифовальных кругов
JPS5330094A (en) * 1976-09-01 1978-03-20 Toshiba Corp Method of dressing grinding wheel for internal cutting
SU709347A1 (ru) * 1978-01-10 1980-01-15 Предприятие П/Я В-8932 Устройство дл управлени правкой шлифовального круга
JPS5755014A (en) * 1980-09-19 1982-04-01 Omron Tateisi Electronics Co Electrostatic capacitance type keyboard switch
JPS59122209U (ja) * 1983-02-07 1984-08-17 株式会社デイスコ 切断機
SU1154082A1 (ru) * 1984-02-06 1985-05-07 Всесоюзный Научно-Исследовательский Институт Абразивов И Шлифования Устройство дл определени динамических характеристик абразивного круга
JPS62199359A (ja) * 1986-02-21 1987-09-03 Okamoto Kosaku Kikai Seisakusho:Kk 連続ドレツシング制御方法及びその装置
US4903681A (en) * 1987-02-24 1990-02-27 Tokyo Seimitus Co., Ltd. Method and apparatus for cutting a cylindrical material

Also Published As

Publication number Publication date
EP0329087B1 (de) 1994-11-17
KR930007570B1 (ko) 1993-08-13
US5000156A (en) 1991-03-19
KR890012754A (ko) 1989-09-19
DE68919373D1 (de) 1994-12-22
EP0329087A1 (de) 1989-08-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee