JPS59116189A - 単結晶形状制御方法 - Google Patents

単結晶形状制御方法

Info

Publication number
JPS59116189A
JPS59116189A JP22397782A JP22397782A JPS59116189A JP S59116189 A JPS59116189 A JP S59116189A JP 22397782 A JP22397782 A JP 22397782A JP 22397782 A JP22397782 A JP 22397782A JP S59116189 A JPS59116189 A JP S59116189A
Authority
JP
Japan
Prior art keywords
crystal
diameter
shoulder
single crystal
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22397782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512310B2 (enrdf_load_stackoverflow
Inventor
Shoichi Washitsuka
鷲塚　章一
Sadao Matsumura
禎夫 松村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP22397782A priority Critical patent/JPS59116189A/ja
Publication of JPS59116189A publication Critical patent/JPS59116189A/ja
Publication of JPH0512310B2 publication Critical patent/JPH0512310B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP22397782A 1982-12-22 1982-12-22 単結晶形状制御方法 Granted JPS59116189A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22397782A JPS59116189A (ja) 1982-12-22 1982-12-22 単結晶形状制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22397782A JPS59116189A (ja) 1982-12-22 1982-12-22 単結晶形状制御方法

Publications (2)

Publication Number Publication Date
JPS59116189A true JPS59116189A (ja) 1984-07-04
JPH0512310B2 JPH0512310B2 (enrdf_load_stackoverflow) 1993-02-17

Family

ID=16806636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22397782A Granted JPS59116189A (ja) 1982-12-22 1982-12-22 単結晶形状制御方法

Country Status (1)

Country Link
JP (1) JPS59116189A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4973377A (en) * 1987-03-31 1990-11-27 Shin-Etsu Handotai Company, Ltd. Crystal diameter controlling method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4973377A (en) * 1987-03-31 1990-11-27 Shin-Etsu Handotai Company, Ltd. Crystal diameter controlling method

Also Published As

Publication number Publication date
JPH0512310B2 (enrdf_load_stackoverflow) 1993-02-17

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