JPS59115736A - シリコン顆粒供給装置 - Google Patents
シリコン顆粒供給装置Info
- Publication number
- JPS59115736A JPS59115736A JP23253282A JP23253282A JPS59115736A JP S59115736 A JPS59115736 A JP S59115736A JP 23253282 A JP23253282 A JP 23253282A JP 23253282 A JP23253282 A JP 23253282A JP S59115736 A JPS59115736 A JP S59115736A
- Authority
- JP
- Japan
- Prior art keywords
- granules
- hopper
- silicon
- trough
- silicon granules
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000008187 granular material Substances 0.000 title claims abstract description 58
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 51
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 51
- 239000010703 silicon Substances 0.000 title claims abstract description 51
- 239000010453 quartz Substances 0.000 claims abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000011261 inert gas Substances 0.000 claims abstract description 3
- 238000002844 melting Methods 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 239000000155 melt Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000012768 molten material Substances 0.000 claims description 4
- 229920001296 polysiloxane Polymers 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000013078 crystal Substances 0.000 abstract description 9
- 238000005303 weighing Methods 0.000 abstract description 3
- 230000000903 blocking effect Effects 0.000 abstract 1
- 238000007689 inspection Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001595 flow curve Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/0015—Feeding of the particles in the reactor; Evacuation of the particles out of the reactor
- B01J8/0035—Periodical feeding or evacuation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Filling Or Emptying Of Bunkers, Hoppers, And Tanks (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Silicon Compounds (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23253282A JPS59115736A (ja) | 1982-12-23 | 1982-12-23 | シリコン顆粒供給装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23253282A JPS59115736A (ja) | 1982-12-23 | 1982-12-23 | シリコン顆粒供給装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59115736A true JPS59115736A (ja) | 1984-07-04 |
JPS6117537B2 JPS6117537B2 (enrdf_load_stackoverflow) | 1986-05-08 |
Family
ID=16940809
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23253282A Granted JPS59115736A (ja) | 1982-12-23 | 1982-12-23 | シリコン顆粒供給装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59115736A (enrdf_load_stackoverflow) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0292889A (ja) * | 1988-09-28 | 1990-04-03 | Osaka Titanium Co Ltd | Cz炉への原料供給装置 |
JPH03124598A (ja) * | 1989-10-11 | 1991-05-28 | Sapporo Breweries Ltd | 自動開缶・液抜装置 |
WO1999055940A1 (en) * | 1998-04-29 | 1999-11-04 | Memc Electronic Materials, Inc. | Method and system for supplying semi-conductor source material |
JP2002167299A (ja) * | 2000-11-29 | 2002-06-11 | Hitachi Metals Ltd | 単結晶の育成方法 |
FR2831149A1 (fr) | 2001-10-24 | 2003-04-25 | Mann & Hummel Protec Gmbh | Systeme de transfert notamment pour des granules de silicone |
US20120085284A1 (en) * | 2010-10-07 | 2012-04-12 | Dassel Mark W | Mechanically fluidized reactor systems and methods, suitable for production of silicon |
US20120199221A1 (en) * | 2010-08-09 | 2012-08-09 | Sinfonia Technology Co., Ltd. | Raw material loading apparatus |
CN102634852A (zh) * | 2012-04-16 | 2012-08-15 | 江苏永能光伏科技有限公司 | 微量添加装置 |
US20120228081A1 (en) * | 2011-03-09 | 2012-09-13 | Sinfonia Technology Co., Ltd. | Raw material loading apparatus and pipe unit for raw material loading apparatus |
JP2012189244A (ja) * | 2011-03-09 | 2012-10-04 | Sinfonia Technology Co Ltd | 被処理物投入装置用のパイプユニット及びこのパイプユニットに用いるパイプ |
CN103026160A (zh) * | 2011-03-09 | 2013-04-03 | 昕芙旎雅有限公司 | 被处理物投入装置、被处理物投入装置用的管道单元及该管道单元所用的管道 |
CN104947186A (zh) * | 2015-07-16 | 2015-09-30 | 江苏协鑫软控设备科技发展有限公司 | 可移动的多晶铸锭炉二次加料装置 |
US9365929B2 (en) | 2012-05-25 | 2016-06-14 | Rokstar Technologies Llc | Mechanically fluidized silicon deposition systems and methods |
CN108147152A (zh) * | 2017-12-22 | 2018-06-12 | 内蒙古科技大学 | 一种生产稀土着色剂的自动装料系统及其装料方法 |
CN117383292A (zh) * | 2023-12-11 | 2024-01-12 | 慧眼奇智(广州)精密技术有限公司 | 一种适用于硅料的供料系统 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0439084U (enrdf_load_stackoverflow) * | 1990-07-26 | 1992-04-02 | ||
CN109261079B (zh) * | 2018-10-08 | 2021-08-13 | 中国核电工程有限公司 | 加药系统和加药方法 |
-
1982
- 1982-12-23 JP JP23253282A patent/JPS59115736A/ja active Granted
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0292889A (ja) * | 1988-09-28 | 1990-04-03 | Osaka Titanium Co Ltd | Cz炉への原料供給装置 |
JPH03124598A (ja) * | 1989-10-11 | 1991-05-28 | Sapporo Breweries Ltd | 自動開缶・液抜装置 |
WO1999055940A1 (en) * | 1998-04-29 | 1999-11-04 | Memc Electronic Materials, Inc. | Method and system for supplying semi-conductor source material |
US6089285A (en) * | 1998-04-29 | 2000-07-18 | Memc Electronics Materials, Inc. | Method and system for supplying semiconductor source material |
JP2002167299A (ja) * | 2000-11-29 | 2002-06-11 | Hitachi Metals Ltd | 単結晶の育成方法 |
FR2831149A1 (fr) | 2001-10-24 | 2003-04-25 | Mann & Hummel Protec Gmbh | Systeme de transfert notamment pour des granules de silicone |
DE10248940B4 (de) * | 2001-10-24 | 2008-07-10 | Mann + Hummel Protec Gmbh | Fördersystem |
US20120199221A1 (en) * | 2010-08-09 | 2012-08-09 | Sinfonia Technology Co., Ltd. | Raw material loading apparatus |
US8881885B2 (en) | 2010-08-09 | 2014-11-11 | Sinfonia Technology Co., Ltd. | Raw material loading apparatus |
US20120085284A1 (en) * | 2010-10-07 | 2012-04-12 | Dassel Mark W | Mechanically fluidized reactor systems and methods, suitable for production of silicon |
US20120228081A1 (en) * | 2011-03-09 | 2012-09-13 | Sinfonia Technology Co., Ltd. | Raw material loading apparatus and pipe unit for raw material loading apparatus |
JP2012189244A (ja) * | 2011-03-09 | 2012-10-04 | Sinfonia Technology Co Ltd | 被処理物投入装置用のパイプユニット及びこのパイプユニットに用いるパイプ |
CN103026160A (zh) * | 2011-03-09 | 2013-04-03 | 昕芙旎雅有限公司 | 被处理物投入装置、被处理物投入装置用的管道单元及该管道单元所用的管道 |
US8684151B2 (en) | 2011-03-09 | 2014-04-01 | Sinfonia Technology Co., Ltd. | Raw material loading apparatus and pipe unit for raw material loading apparatus |
CN102634852A (zh) * | 2012-04-16 | 2012-08-15 | 江苏永能光伏科技有限公司 | 微量添加装置 |
US9365929B2 (en) | 2012-05-25 | 2016-06-14 | Rokstar Technologies Llc | Mechanically fluidized silicon deposition systems and methods |
CN104947186A (zh) * | 2015-07-16 | 2015-09-30 | 江苏协鑫软控设备科技发展有限公司 | 可移动的多晶铸锭炉二次加料装置 |
CN108147152A (zh) * | 2017-12-22 | 2018-06-12 | 内蒙古科技大学 | 一种生产稀土着色剂的自动装料系统及其装料方法 |
CN117383292A (zh) * | 2023-12-11 | 2024-01-12 | 慧眼奇智(广州)精密技术有限公司 | 一种适用于硅料的供料系统 |
CN117383292B (zh) * | 2023-12-11 | 2024-03-12 | 慧眼奇智(广州)精密技术有限公司 | 一种适用于硅料的供料系统 |
Also Published As
Publication number | Publication date |
---|---|
JPS6117537B2 (enrdf_load_stackoverflow) | 1986-05-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS59115736A (ja) | シリコン顆粒供給装置 | |
JP2754104B2 (ja) | 半導体単結晶引上用粒状原料供給装置 | |
JPS5919913B2 (ja) | 連続式半導体結晶成長装置 | |
EP2699716A2 (en) | Side feed system for czochralski growth of silicon ingots | |
US4762687A (en) | Means for forming a melt of a semiconductor material in order to make a crystalline element grow therein | |
EP0771891A1 (en) | Solid material delivery system for a furnace | |
EP0406824A1 (en) | Apparatus for feeding granular silicon material | |
CN110697438B (zh) | 基于神经网络的直落失重式物料下料机控制器 | |
JP2617197B2 (ja) | 粉粒体供給装置 | |
JP2674053B2 (ja) | 金属粒連続製造装置 | |
US10202704B2 (en) | Side feed system for Czochralski growth of silicon ingots | |
JPH04502447A (ja) | 原材料の供給装置 | |
US20240216943A1 (en) | Melter with self-cleaning filter | |
JP4506050B2 (ja) | 処理システム及び被処理体の管理方法 | |
KR101544218B1 (ko) | 확산로에서의 제트 적층 납땜 장치 | |
JP2564497B2 (ja) | 炉内圧力制御方法 | |
ES2483441T3 (es) | Procedimiento de control para la fundición de una carga metálica y dispositivo de pesaje utilizado en dicho procedimiento | |
KR960010018B1 (ko) | 유동층 킬른내의 주조용 고사의 열재생중 토출사를 조절하기 위한 방법과 장치 | |
CN217384423U (zh) | 给料装置 | |
JP2914990B2 (ja) | 湯面異常状況検出方法および湯面異常防止方法並びにその防止装置 | |
JP2569344B2 (ja) | 溶融物の定量出湯方法 | |
JP2723161B2 (ja) | 竪型誘導加熱炉の炉内雰囲気制御方法 | |
JP2000243804A (ja) | 半導体ウェーハの移載方法と装置 | |
JP2006151768A (ja) | 析出板製造装置 | |
JPH0514159Y2 (enrdf_load_stackoverflow) |