JPS5911400Y2 - 電界放射型イオン源 - Google Patents

電界放射型イオン源

Info

Publication number
JPS5911400Y2
JPS5911400Y2 JP2368680U JP2368680U JPS5911400Y2 JP S5911400 Y2 JPS5911400 Y2 JP S5911400Y2 JP 2368680 U JP2368680 U JP 2368680U JP 2368680 U JP2368680 U JP 2368680U JP S5911400 Y2 JPS5911400 Y2 JP S5911400Y2
Authority
JP
Japan
Prior art keywords
tip
ion source
tubular member
insulating plate
field emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2368680U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56124953U (enExample
Inventor
昌彦 奥貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP2368680U priority Critical patent/JPS5911400Y2/ja
Publication of JPS56124953U publication Critical patent/JPS56124953U/ja
Application granted granted Critical
Publication of JPS5911400Y2 publication Critical patent/JPS5911400Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP2368680U 1980-02-26 1980-02-26 電界放射型イオン源 Expired JPS5911400Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2368680U JPS5911400Y2 (ja) 1980-02-26 1980-02-26 電界放射型イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2368680U JPS5911400Y2 (ja) 1980-02-26 1980-02-26 電界放射型イオン源

Publications (2)

Publication Number Publication Date
JPS56124953U JPS56124953U (enExample) 1981-09-22
JPS5911400Y2 true JPS5911400Y2 (ja) 1984-04-07

Family

ID=29619778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2368680U Expired JPS5911400Y2 (ja) 1980-02-26 1980-02-26 電界放射型イオン源

Country Status (1)

Country Link
JP (1) JPS5911400Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59101749A (ja) * 1982-12-01 1984-06-12 Hitachi Ltd イオン源およびイオンビーム形成方法

Also Published As

Publication number Publication date
JPS56124953U (enExample) 1981-09-22

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