JPS59103261A - 電子線装置 - Google Patents

電子線装置

Info

Publication number
JPS59103261A
JPS59103261A JP57212498A JP21249882A JPS59103261A JP S59103261 A JPS59103261 A JP S59103261A JP 57212498 A JP57212498 A JP 57212498A JP 21249882 A JP21249882 A JP 21249882A JP S59103261 A JPS59103261 A JP S59103261A
Authority
JP
Japan
Prior art keywords
sample
pulse
electron beam
signal
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57212498A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6363112B2 (cg-RX-API-DMAC7.html
Inventor
Hitoshi Hirata
平田　衡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57212498A priority Critical patent/JPS59103261A/ja
Publication of JPS59103261A publication Critical patent/JPS59103261A/ja
Publication of JPS6363112B2 publication Critical patent/JPS6363112B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57212498A 1982-12-03 1982-12-03 電子線装置 Granted JPS59103261A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57212498A JPS59103261A (ja) 1982-12-03 1982-12-03 電子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57212498A JPS59103261A (ja) 1982-12-03 1982-12-03 電子線装置

Publications (2)

Publication Number Publication Date
JPS59103261A true JPS59103261A (ja) 1984-06-14
JPS6363112B2 JPS6363112B2 (cg-RX-API-DMAC7.html) 1988-12-06

Family

ID=16623653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57212498A Granted JPS59103261A (ja) 1982-12-03 1982-12-03 電子線装置

Country Status (1)

Country Link
JP (1) JPS59103261A (cg-RX-API-DMAC7.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60245532A (ja) * 1984-05-22 1985-12-05 Shinwa Tec Kk プラスチツク射出成形機用クリ−ンブ−ス
JPS60245522A (ja) * 1984-05-22 1985-12-05 Shinwa Tec Kk プラスチツク射出成形機用クリ−ンブ−ス
JP2005199047A (ja) * 2003-12-05 2005-07-28 General Electric Co <Ge> 冷却剤冷却式のｒｆ体幹用コイル

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60245532A (ja) * 1984-05-22 1985-12-05 Shinwa Tec Kk プラスチツク射出成形機用クリ−ンブ−ス
JPS60245522A (ja) * 1984-05-22 1985-12-05 Shinwa Tec Kk プラスチツク射出成形機用クリ−ンブ−ス
JP2005199047A (ja) * 2003-12-05 2005-07-28 General Electric Co <Ge> 冷却剤冷却式のｒｆ体幹用コイル

Also Published As

Publication number Publication date
JPS6363112B2 (cg-RX-API-DMAC7.html) 1988-12-06

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