JPS5910270A - 半導体集積回路装置 - Google Patents
半導体集積回路装置Info
- Publication number
- JPS5910270A JPS5910270A JP57119303A JP11930382A JPS5910270A JP S5910270 A JPS5910270 A JP S5910270A JP 57119303 A JP57119303 A JP 57119303A JP 11930382 A JP11930382 A JP 11930382A JP S5910270 A JPS5910270 A JP S5910270A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- layer
- platinum silicide
- platinum
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/60—Electrodes characterised by their materials
- H10D64/62—Electrodes ohmically coupled to a semiconductor
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57119303A JPS5910270A (ja) | 1982-07-09 | 1982-07-09 | 半導体集積回路装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57119303A JPS5910270A (ja) | 1982-07-09 | 1982-07-09 | 半導体集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5910270A true JPS5910270A (ja) | 1984-01-19 |
| JPH0376023B2 JPH0376023B2 (cs) | 1991-12-04 |
Family
ID=14758077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57119303A Granted JPS5910270A (ja) | 1982-07-09 | 1982-07-09 | 半導体集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5910270A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61210662A (ja) * | 1985-01-22 | 1986-09-18 | フエアチヤイルド セミコンダクタ コ−ポレ−シヨン | 半導体構成体 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5570023A (en) * | 1978-11-20 | 1980-05-27 | Mitsubishi Electric Corp | Formation of electrode and wiring for semiconductor |
-
1982
- 1982-07-09 JP JP57119303A patent/JPS5910270A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5570023A (en) * | 1978-11-20 | 1980-05-27 | Mitsubishi Electric Corp | Formation of electrode and wiring for semiconductor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61210662A (ja) * | 1985-01-22 | 1986-09-18 | フエアチヤイルド セミコンダクタ コ−ポレ−シヨン | 半導体構成体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0376023B2 (cs) | 1991-12-04 |
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