JPS59100143A - 合成樹脂製品のプラズマ処理装置 - Google Patents

合成樹脂製品のプラズマ処理装置

Info

Publication number
JPS59100143A
JPS59100143A JP21016882A JP21016882A JPS59100143A JP S59100143 A JPS59100143 A JP S59100143A JP 21016882 A JP21016882 A JP 21016882A JP 21016882 A JP21016882 A JP 21016882A JP S59100143 A JPS59100143 A JP S59100143A
Authority
JP
Japan
Prior art keywords
plasma
reaction chamber
pipe
processing
synthetic resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21016882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH033700B2 (enrdf_load_stackoverflow
Inventor
Takaoki Kaneko
金子　隆興
Kenji Fukuda
賢治 福田
Yoshinobu Takahashi
芳信 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP21016882A priority Critical patent/JPS59100143A/ja
Publication of JPS59100143A publication Critical patent/JPS59100143A/ja
Publication of JPH033700B2 publication Critical patent/JPH033700B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP21016882A 1982-11-30 1982-11-30 合成樹脂製品のプラズマ処理装置 Granted JPS59100143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21016882A JPS59100143A (ja) 1982-11-30 1982-11-30 合成樹脂製品のプラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21016882A JPS59100143A (ja) 1982-11-30 1982-11-30 合成樹脂製品のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS59100143A true JPS59100143A (ja) 1984-06-09
JPH033700B2 JPH033700B2 (enrdf_load_stackoverflow) 1991-01-21

Family

ID=16584892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21016882A Granted JPS59100143A (ja) 1982-11-30 1982-11-30 合成樹脂製品のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS59100143A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101634A (ja) * 1985-10-30 1987-05-12 Hashimoto Forming Co Ltd 装飾用モールディングの製造方法
EP0120307A3 (en) * 1983-02-25 1989-05-03 Toyota Jidosha Kabushiki Kaisha Apparatus and method for plasma treatment of resin material
JP2000073029A (ja) * 1998-08-26 2000-03-07 Nitto Denko Corp 粘着部材及びその製造方法
KR20210020042A (ko) 2018-06-08 2021-02-23 쇼와덴코머티리얼즈가부시끼가이샤 점착 시트의 제조 방법, 다이싱·다이본딩 일체형 테이프의 제조 방법, 반도체 장치의 제조 방법, 점착제의 처리 방법, 피착체의 고정화 방법, 및 피착체의 박리 방법

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0120307A3 (en) * 1983-02-25 1989-05-03 Toyota Jidosha Kabushiki Kaisha Apparatus and method for plasma treatment of resin material
JPS62101634A (ja) * 1985-10-30 1987-05-12 Hashimoto Forming Co Ltd 装飾用モールディングの製造方法
JP2000073029A (ja) * 1998-08-26 2000-03-07 Nitto Denko Corp 粘着部材及びその製造方法
KR20210020042A (ko) 2018-06-08 2021-02-23 쇼와덴코머티리얼즈가부시끼가이샤 점착 시트의 제조 방법, 다이싱·다이본딩 일체형 테이프의 제조 방법, 반도체 장치의 제조 방법, 점착제의 처리 방법, 피착체의 고정화 방법, 및 피착체의 박리 방법

Also Published As

Publication number Publication date
JPH033700B2 (enrdf_load_stackoverflow) 1991-01-21

Similar Documents

Publication Publication Date Title
KR950027986A (ko) 반도체장치의 제조방법과 제조장치
MX163318A (es) Un proceso mejorado para depositar una pelicula sobre un substrato por deposicion quimica de vapor fotoasistida
IL41223A (en) Method of improving the surface properties of plastic articles used for the cultivation of living tissues and cells
JPS59100143A (ja) 合成樹脂製品のプラズマ処理装置
ATE86794T1 (de) Verfahren zur herstellung einer niedergeschlagenen schicht.
US3657030A (en) Technique for masking silicon nitride during phosphoric acid etching
JPS60245217A (ja) 薄膜形成装置
US4308301A (en) Process for metal-coating plastic surfaces
ATE277691T1 (de) Vorrichtung zur beschichtung eines gegenstands mit einem wirkstoff und verfahren zur herstellung eines partiellen oder vollständigen wirkstoffüberzuges auf und im implantaten und onplantaten sowie verwendung dieses verfahrens und durch dieses verfahren hergestelltes erzeugnis
JPH04362178A (ja) 完全または部分的被覆金層の製造方法
JPS56147832A (en) Surface treating device
SE7701645L (sv) Koaguleringsoverdragningsforfarande
JP3505571B2 (ja) ポリプロピレンをベースフィルムとするガスバリヤーフィルムの製造方法
JPS5767009A (en) Formation of film
JPS62205279A (ja) レ−ザｃｖｄ法
JPS5713746A (en) Vapor-phase growing apparatus
JP3149689B2 (ja) ポリオレフィン系樹脂成形物の表面改質方法及びその表面塗装方法
Lee et al. Development of functionally gradient W/Mo material by laser beam
JPS55154567A (en) Manufacture of metal plating body
JPS57202740A (en) Manufacture of semiconductor device
JPH0228223A (ja) プラズマ処理装置
JPH05131170A (ja) 塗装前処理方法
JPS6481314A (en) Formation of doping silicon thin film
d'Agostino et al. Plasma treatment of PET for improving Al-adhesion
JPS57133635A (en) Formation of insulating film