JPS5899753U - イオン銃 - Google Patents

イオン銃

Info

Publication number
JPS5899753U
JPS5899753U JP19807781U JP19807781U JPS5899753U JP S5899753 U JPS5899753 U JP S5899753U JP 19807781 U JP19807781 U JP 19807781U JP 19807781 U JP19807781 U JP 19807781U JP S5899753 U JPS5899753 U JP S5899753U
Authority
JP
Japan
Prior art keywords
ion gun
ampoule
thermal expansion
expansion material
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19807781U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240344Y2 (enrdf_load_stackoverflow
Inventor
昌彦 奥貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP19807781U priority Critical patent/JPS5899753U/ja
Publication of JPS5899753U publication Critical patent/JPS5899753U/ja
Application granted granted Critical
Publication of JPS6240344Y2 publication Critical patent/JPS6240344Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP19807781U 1981-12-26 1981-12-26 イオン銃 Granted JPS5899753U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19807781U JPS5899753U (ja) 1981-12-26 1981-12-26 イオン銃

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19807781U JPS5899753U (ja) 1981-12-26 1981-12-26 イオン銃

Publications (2)

Publication Number Publication Date
JPS5899753U true JPS5899753U (ja) 1983-07-07
JPS6240344Y2 JPS6240344Y2 (enrdf_load_stackoverflow) 1987-10-15

Family

ID=30111274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19807781U Granted JPS5899753U (ja) 1981-12-26 1981-12-26 イオン銃

Country Status (1)

Country Link
JP (1) JPS5899753U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6240344Y2 (enrdf_load_stackoverflow) 1987-10-15

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