JPS5899753U - ion gun - Google Patents

ion gun

Info

Publication number
JPS5899753U
JPS5899753U JP19807781U JP19807781U JPS5899753U JP S5899753 U JPS5899753 U JP S5899753U JP 19807781 U JP19807781 U JP 19807781U JP 19807781 U JP19807781 U JP 19807781U JP S5899753 U JPS5899753 U JP S5899753U
Authority
JP
Japan
Prior art keywords
ion gun
ampoule
thermal expansion
expansion material
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19807781U
Other languages
Japanese (ja)
Other versions
JPS6240344Y2 (en
Inventor
昌彦 奥貫
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP19807781U priority Critical patent/JPS5899753U/en
Publication of JPS5899753U publication Critical patent/JPS5899753U/en
Application granted granted Critical
Publication of JPS6240344Y2 publication Critical patent/JPS6240344Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示すイオン銃の垂直断面図
、第２図はその部分拡大図、第３図は作動状態を示、す
部分拡大図である。 １：エミッタ一部、１ａ：キャピラリー、１ｂ＝スポッ
ト溶接部、１Ｃ：間隙、１ｄ：ニードル、２：液体金Ｌ
　２３：ティラーコーン突起、３：エミッター固定材、
４：アンプルホルダー、５：熱膨張材固定金具、６：熱
膨張材、７：アンプル空間、８：アンプル、９：キャッ
プ、１０：熱遮蔽板、１１：゛加熱器ζ１２：引出電極
、１２ａ：細孔、１３：接地電極、１３ａ：細孔、１４
：イオン銃室、１５：高圧導入端　−子、１６：イオン
ビーム。FIG. 1 is a vertical sectional view of an ion gun showing an embodiment of the present invention, FIG. 2 is a partially enlarged view thereof, and FIG. 3 is a partially enlarged view showing the ion gun in its operating state. 1: part of emitter, 1a: capillary, 1b = spot weld, 1C: gap, 1d: needle, 2: liquid gold L
23: Tiller cone protrusion, 3: Emitter fixing material,
4: Ampoule holder, 5: Thermal expansion material fixing fitting, 6: Thermal expansion material, 7: Ampoule space, 8: Ampoule, 9: Cap, 10: Heat shield plate, 11: Heater ζ 12: Extraction electrode, 12a: Pore, 13: Ground electrode, 13a: Pore, 14
: Ion gun chamber, 15: High pressure introduction terminal, 16: Ion beam.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 反応性金属のアンプルを収納し、かつ該金属のリザーバ
部に連通ずる真空排気されたアンプル収納空間と、前記
アンプルを圧壊するための熱膨張材と、該熱膨張材を加
熱する手段を具備することを特徴とするイオン銃。A vacuum-evacuated ampoule storage space that stores an ampoule of a reactive metal and communicates with a reservoir portion of the metal, a thermal expansion material for crushing the ampoule, and means for heating the thermal expansion material. An ion gun characterized by:
JP19807781U 1981-12-26 1981-12-26 ion gun Granted JPS5899753U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19807781U JPS5899753U (en) 1981-12-26 1981-12-26 ion gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19807781U JPS5899753U (en) 1981-12-26 1981-12-26 ion gun

Publications (2)

Publication Number Publication Date
JPS5899753U true JPS5899753U (en) 1983-07-07
JPS6240344Y2 JPS6240344Y2 (en) 1987-10-15

Family

ID=30111274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19807781U Granted JPS5899753U (en) 1981-12-26 1981-12-26 ion gun

Country Status (1)

Country Link
JP (1) JPS5899753U (en)

Also Published As

Publication number Publication date
JPS6240344Y2 (en) 1987-10-15

Similar Documents

Publication Publication Date Title
JPS5899753U (en) ion gun
JPS6050841A (en) Liquid metal ion source
JPH07105190B2 (en) Method for manufacturing impregnated cathode assembly
JPS5879844U (en) liquid metal ion source
JPS6143257U (en) gas heating device
JPH0612601Y2 (en) Impregnated cathode
JPS6162330U (en)
JPS62178559U (en)
JPS5881967U (en) gas laser tube
JPS63164153U (en)
JPS63146327A (en) Liquid metal ion source
JPS63188856U (en)
JPS6296247U (en)
JPH01179346U (en)
JPS6059387U (en) heat generating device
JPS5869969U (en) gas laser tube
JPS5954187U (en) Pressure electrode for spot welding
JPS59129155U (en) Field emission ion source
JPS6322058U (en)
JPS6326968U (en)
JPS5976842U (en) combustion device
GB1392755A (en) Cathodes for electron guns
JPS6346115U (en)
JPS62177067U (en)
JPH077055U (en) Fluorescent display tube