JPS5885337U - 半導体基板の有機処理装置 - Google Patents
半導体基板の有機処理装置Info
- Publication number
- JPS5885337U JPS5885337U JP18038681U JP18038681U JPS5885337U JP S5885337 U JPS5885337 U JP S5885337U JP 18038681 U JP18038681 U JP 18038681U JP 18038681 U JP18038681 U JP 18038681U JP S5885337 U JPS5885337 U JP S5885337U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrates
- processing equipment
- organic processing
- cup
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18038681U JPS5885337U (ja) | 1981-12-03 | 1981-12-03 | 半導体基板の有機処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18038681U JPS5885337U (ja) | 1981-12-03 | 1981-12-03 | 半導体基板の有機処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5885337U true JPS5885337U (ja) | 1983-06-09 |
JPS6210996Y2 JPS6210996Y2 (enrdf_load_stackoverflow) | 1987-03-16 |
Family
ID=29976932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18038681U Granted JPS5885337U (ja) | 1981-12-03 | 1981-12-03 | 半導体基板の有機処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5885337U (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6425535A (en) * | 1987-07-22 | 1989-01-27 | Matsushita Electronics Corp | Treatment of substrate for forming resist film |
-
1981
- 1981-12-03 JP JP18038681U patent/JPS5885337U/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6425535A (en) * | 1987-07-22 | 1989-01-27 | Matsushita Electronics Corp | Treatment of substrate for forming resist film |
Also Published As
Publication number | Publication date |
---|---|
JPS6210996Y2 (enrdf_load_stackoverflow) | 1987-03-16 |
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