Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co LtdfiledCriticalShin-Etsu Chemical Co Ltd
Priority to JP18334981ApriorityCriticalpatent/JPS5884832A/ja
Priority to US06/441,945prioritypatent/US4456572A/en
Priority to GB08232528Aprioritypatent/GB2110216A/en
Publication of JPS5884832ApublicationCriticalpatent/JPS5884832A/ja
Publication of JPS6217613B2publicationCriticalpatent/JPS6217613B2/ja