JPS5884403A - 薄膜サ−ミスタの製造方法 - Google Patents

薄膜サ−ミスタの製造方法

Info

Publication number
JPS5884403A
JPS5884403A JP56182062A JP18206281A JPS5884403A JP S5884403 A JPS5884403 A JP S5884403A JP 56182062 A JP56182062 A JP 56182062A JP 18206281 A JP18206281 A JP 18206281A JP S5884403 A JPS5884403 A JP S5884403A
Authority
JP
Japan
Prior art keywords
electrode film
film
sub
thermistor
insulating substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56182062A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6252925B2 (enExample
Inventor
一志 山本
彪 長井
郁夫 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56182062A priority Critical patent/JPS5884403A/ja
Publication of JPS5884403A publication Critical patent/JPS5884403A/ja
Publication of JPS6252925B2 publication Critical patent/JPS6252925B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP56182062A 1981-11-12 1981-11-12 薄膜サ−ミスタの製造方法 Granted JPS5884403A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56182062A JPS5884403A (ja) 1981-11-12 1981-11-12 薄膜サ−ミスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56182062A JPS5884403A (ja) 1981-11-12 1981-11-12 薄膜サ−ミスタの製造方法

Publications (2)

Publication Number Publication Date
JPS5884403A true JPS5884403A (ja) 1983-05-20
JPS6252925B2 JPS6252925B2 (enExample) 1987-11-07

Family

ID=16111671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56182062A Granted JPS5884403A (ja) 1981-11-12 1981-11-12 薄膜サ−ミスタの製造方法

Country Status (1)

Country Link
JP (1) JPS5884403A (enExample)

Also Published As

Publication number Publication date
JPS6252925B2 (enExample) 1987-11-07

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