JPS5883238A - 物体の表面欠陥の検出方法とその装置 - Google Patents

物体の表面欠陥の検出方法とその装置

Info

Publication number
JPS5883238A
JPS5883238A JP18195581A JP18195581A JPS5883238A JP S5883238 A JPS5883238 A JP S5883238A JP 18195581 A JP18195581 A JP 18195581A JP 18195581 A JP18195581 A JP 18195581A JP S5883238 A JPS5883238 A JP S5883238A
Authority
JP
Japan
Prior art keywords
signal
delay
electrical signal
circuit
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18195581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0225451B2 (enExample
Inventor
Toshihiko Omichi
大道　俊彦
Yoshikazu Ikeki
池木　美一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Koyo Automatic Machine Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Koyo Automatic Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd, Koyo Automatic Machine Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP18195581A priority Critical patent/JPS5883238A/ja
Publication of JPS5883238A publication Critical patent/JPS5883238A/ja
Publication of JPH0225451B2 publication Critical patent/JPH0225451B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP18195581A 1981-11-12 1981-11-12 物体の表面欠陥の検出方法とその装置 Granted JPS5883238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18195581A JPS5883238A (ja) 1981-11-12 1981-11-12 物体の表面欠陥の検出方法とその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18195581A JPS5883238A (ja) 1981-11-12 1981-11-12 物体の表面欠陥の検出方法とその装置

Publications (2)

Publication Number Publication Date
JPS5883238A true JPS5883238A (ja) 1983-05-19
JPH0225451B2 JPH0225451B2 (enExample) 1990-06-04

Family

ID=16109789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18195581A Granted JPS5883238A (ja) 1981-11-12 1981-11-12 物体の表面欠陥の検出方法とその装置

Country Status (1)

Country Link
JP (1) JPS5883238A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61217746A (ja) * 1985-03-25 1986-09-27 Mitsubishi Electric Corp 光学的表面検査装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61217746A (ja) * 1985-03-25 1986-09-27 Mitsubishi Electric Corp 光学的表面検査装置

Also Published As

Publication number Publication date
JPH0225451B2 (enExample) 1990-06-04

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