JPS5879146A - 表面疵検査装置の自動感度補正機構 - Google Patents

表面疵検査装置の自動感度補正機構

Info

Publication number
JPS5879146A
JPS5879146A JP17641181A JP17641181A JPS5879146A JP S5879146 A JPS5879146 A JP S5879146A JP 17641181 A JP17641181 A JP 17641181A JP 17641181 A JP17641181 A JP 17641181A JP S5879146 A JPS5879146 A JP S5879146A
Authority
JP
Japan
Prior art keywords
output
scanning
photodiode array
clock
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17641181A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247696B2 (enrdf_load_stackoverflow
Inventor
Masakazu Fujita
正和 藤田
Hideo Kitsuka
木塚　秀雄
Yukio Furukawa
古川　幸夫
Yasuhiko Masuno
増野　豈彦
Shoji Akutsu
阿久津　昭司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
TOEI DENSHI KOGYO KK
Original Assignee
Kawasaki Steel Corp
TOEI DENSHI KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp, TOEI DENSHI KOGYO KK filed Critical Kawasaki Steel Corp
Priority to JP17641181A priority Critical patent/JPS5879146A/ja
Publication of JPS5879146A publication Critical patent/JPS5879146A/ja
Publication of JPH0247696B2 publication Critical patent/JPH0247696B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP17641181A 1981-11-05 1981-11-05 表面疵検査装置の自動感度補正機構 Granted JPS5879146A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17641181A JPS5879146A (ja) 1981-11-05 1981-11-05 表面疵検査装置の自動感度補正機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17641181A JPS5879146A (ja) 1981-11-05 1981-11-05 表面疵検査装置の自動感度補正機構

Publications (2)

Publication Number Publication Date
JPS5879146A true JPS5879146A (ja) 1983-05-12
JPH0247696B2 JPH0247696B2 (enrdf_load_stackoverflow) 1990-10-22

Family

ID=16013206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17641181A Granted JPS5879146A (ja) 1981-11-05 1981-11-05 表面疵検査装置の自動感度補正機構

Country Status (1)

Country Link
JP (1) JPS5879146A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0254129A (ja) * 1988-08-18 1990-02-23 Fuji Electric Co Ltd センサアレイの検出値出力方式
JP2021113749A (ja) * 2020-01-20 2021-08-05 Ｊｆｅスチール株式会社 表面検査装置、表面検査方法、鋼材の製造方法、鋼材の品質管理方法、及び鋼材の製造設備

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119847U (enrdf_load_stackoverflow) * 1976-03-09 1977-09-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52119847U (enrdf_load_stackoverflow) * 1976-03-09 1977-09-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0254129A (ja) * 1988-08-18 1990-02-23 Fuji Electric Co Ltd センサアレイの検出値出力方式
JP2021113749A (ja) * 2020-01-20 2021-08-05 Ｊｆｅスチール株式会社 表面検査装置、表面検査方法、鋼材の製造方法、鋼材の品質管理方法、及び鋼材の製造設備

Also Published As

Publication number Publication date
JPH0247696B2 (enrdf_load_stackoverflow) 1990-10-22

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