JPS5878644U - ダイシング装置 - Google Patents
ダイシング装置Info
- Publication number
- JPS5878644U JPS5878644U JP17523981U JP17523981U JPS5878644U JP S5878644 U JPS5878644 U JP S5878644U JP 17523981 U JP17523981 U JP 17523981U JP 17523981 U JP17523981 U JP 17523981U JP S5878644 U JPS5878644 U JP S5878644U
- Authority
- JP
- Japan
- Prior art keywords
- dicing equipment
- dicing
- equipment
- recorded
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17523981U JPS5878644U (ja) | 1981-11-24 | 1981-11-24 | ダイシング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17523981U JPS5878644U (ja) | 1981-11-24 | 1981-11-24 | ダイシング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5878644U true JPS5878644U (ja) | 1983-05-27 |
JPS633774Y2 JPS633774Y2 (enrdf_load_stackoverflow) | 1988-01-29 |
Family
ID=29967527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17523981U Granted JPS5878644U (ja) | 1981-11-24 | 1981-11-24 | ダイシング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5878644U (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001018189A (ja) * | 1999-07-08 | 2001-01-23 | Konan Sekkei Kogyo Kk | 非金属材料の切断方法およびその装置 |
JP2007125667A (ja) * | 2005-11-07 | 2007-05-24 | Disco Abrasive Syst Ltd | 基板の切断装置 |
JP2013161944A (ja) * | 2012-02-06 | 2013-08-19 | Mitsubishi Electric Corp | ダイシング方法 |
-
1981
- 1981-11-24 JP JP17523981U patent/JPS5878644U/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001018189A (ja) * | 1999-07-08 | 2001-01-23 | Konan Sekkei Kogyo Kk | 非金属材料の切断方法およびその装置 |
JP2007125667A (ja) * | 2005-11-07 | 2007-05-24 | Disco Abrasive Syst Ltd | 基板の切断装置 |
JP2013161944A (ja) * | 2012-02-06 | 2013-08-19 | Mitsubishi Electric Corp | ダイシング方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS633774Y2 (enrdf_load_stackoverflow) | 1988-01-29 |
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