JPS5878360A - 荷電粒子エネルギ−分析装置 - Google Patents

荷電粒子エネルギ−分析装置

Info

Publication number
JPS5878360A
JPS5878360A JP56175178A JP17517881A JPS5878360A JP S5878360 A JPS5878360 A JP S5878360A JP 56175178 A JP56175178 A JP 56175178A JP 17517881 A JP17517881 A JP 17517881A JP S5878360 A JPS5878360 A JP S5878360A
Authority
JP
Japan
Prior art keywords
grid
energy
reflective surface
particles
charged particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56175178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS637656B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Yamauchi
洋 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP56175178A priority Critical patent/JPS5878360A/ja
Publication of JPS5878360A publication Critical patent/JPS5878360A/ja
Publication of JPS637656B2 publication Critical patent/JPS637656B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP56175178A 1981-10-31 1981-10-31 荷電粒子エネルギ−分析装置 Granted JPS5878360A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56175178A JPS5878360A (ja) 1981-10-31 1981-10-31 荷電粒子エネルギ−分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56175178A JPS5878360A (ja) 1981-10-31 1981-10-31 荷電粒子エネルギ−分析装置

Publications (2)

Publication Number Publication Date
JPS5878360A true JPS5878360A (ja) 1983-05-11
JPS637656B2 JPS637656B2 (enrdf_load_stackoverflow) 1988-02-17

Family

ID=15991627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56175178A Granted JPS5878360A (ja) 1981-10-31 1981-10-31 荷電粒子エネルギ−分析装置

Country Status (1)

Country Link
JP (1) JPS5878360A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5962850A (en) * 1998-03-04 1999-10-05 Southwest Research Institute Large aperture particle detector with integrated antenna

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5962850A (en) * 1998-03-04 1999-10-05 Southwest Research Institute Large aperture particle detector with integrated antenna

Also Published As

Publication number Publication date
JPS637656B2 (enrdf_load_stackoverflow) 1988-02-17

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