JPS5863137A - 蒸気圧制御ドライエツチング方法 - Google Patents

蒸気圧制御ドライエツチング方法

Info

Publication number
JPS5863137A
JPS5863137A JP56161836A JP16183681A JPS5863137A JP S5863137 A JPS5863137 A JP S5863137A JP 56161836 A JP56161836 A JP 56161836A JP 16183681 A JP16183681 A JP 16183681A JP S5863137 A JPS5863137 A JP S5863137A
Authority
JP
Japan
Prior art keywords
elements
etching
vapor pressure
steam pressure
high steam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56161836A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0350412B2 (OSRAM
Inventor
Junichi Nishizawa
潤一 西澤
Masakazu Morishita
正和 森下
Tadahiro Omi
忠弘 大見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Research Foundation
Original Assignee
Semiconductor Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Research Foundation filed Critical Semiconductor Research Foundation
Priority to JP56161836A priority Critical patent/JPS5863137A/ja
Publication of JPS5863137A publication Critical patent/JPS5863137A/ja
Publication of JPH0350412B2 publication Critical patent/JPH0350412B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
JP56161836A 1981-10-09 1981-10-09 蒸気圧制御ドライエツチング方法 Granted JPS5863137A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56161836A JPS5863137A (ja) 1981-10-09 1981-10-09 蒸気圧制御ドライエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56161836A JPS5863137A (ja) 1981-10-09 1981-10-09 蒸気圧制御ドライエツチング方法

Publications (2)

Publication Number Publication Date
JPS5863137A true JPS5863137A (ja) 1983-04-14
JPH0350412B2 JPH0350412B2 (OSRAM) 1991-08-01

Family

ID=15742849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56161836A Granted JPS5863137A (ja) 1981-10-09 1981-10-09 蒸気圧制御ドライエツチング方法

Country Status (1)

Country Link
JP (1) JPS5863137A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62159432A (ja) * 1986-01-08 1987-07-15 Matsushita Electric Ind Co Ltd ドライエツチング方法
JPS6310525A (ja) * 1986-07-01 1988-01-18 Nippon Telegr & Teleph Corp <Ntt> 化合物半導体のドライエツチング方法
JPH03124024A (ja) * 1989-10-06 1991-05-27 Sharp Corp 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62159432A (ja) * 1986-01-08 1987-07-15 Matsushita Electric Ind Co Ltd ドライエツチング方法
JPS6310525A (ja) * 1986-07-01 1988-01-18 Nippon Telegr & Teleph Corp <Ntt> 化合物半導体のドライエツチング方法
JPH03124024A (ja) * 1989-10-06 1991-05-27 Sharp Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0350412B2 (OSRAM) 1991-08-01

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