JPH0350412B2 - - Google Patents

Info

Publication number
JPH0350412B2
JPH0350412B2 JP56161836A JP16183681A JPH0350412B2 JP H0350412 B2 JPH0350412 B2 JP H0350412B2 JP 56161836 A JP56161836 A JP 56161836A JP 16183681 A JP16183681 A JP 16183681A JP H0350412 B2 JPH0350412 B2 JP H0350412B2
Authority
JP
Japan
Prior art keywords
etching
vapor pressure
gas
sample
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56161836A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5863137A (ja
Inventor
Junichi Nishizawa
Masakazu Morishita
Tadahiro Oomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP56161836A priority Critical patent/JPS5863137A/ja
Publication of JPS5863137A publication Critical patent/JPS5863137A/ja
Publication of JPH0350412B2 publication Critical patent/JPH0350412B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Drying Of Semiconductors (AREA)
JP56161836A 1981-10-09 1981-10-09 蒸気圧制御ドライエツチング方法 Granted JPS5863137A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56161836A JPS5863137A (ja) 1981-10-09 1981-10-09 蒸気圧制御ドライエツチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56161836A JPS5863137A (ja) 1981-10-09 1981-10-09 蒸気圧制御ドライエツチング方法

Publications (2)

Publication Number Publication Date
JPS5863137A JPS5863137A (ja) 1983-04-14
JPH0350412B2 true JPH0350412B2 (OSRAM) 1991-08-01

Family

ID=15742849

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56161836A Granted JPS5863137A (ja) 1981-10-09 1981-10-09 蒸気圧制御ドライエツチング方法

Country Status (1)

Country Link
JP (1) JPS5863137A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62159432A (ja) * 1986-01-08 1987-07-15 Matsushita Electric Ind Co Ltd ドライエツチング方法
JPH0779098B2 (ja) * 1986-07-01 1995-08-23 日本電信電話株式会社 化合物半導体のドライエツチング方法
JP2614331B2 (ja) * 1989-10-06 1997-05-28 シャープ株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5863137A (ja) 1983-04-14

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