JPS5861650A - 半導体装置 - Google Patents

半導体装置

Info

Publication number
JPS5861650A
JPS5861650A JP16132881A JP16132881A JPS5861650A JP S5861650 A JPS5861650 A JP S5861650A JP 16132881 A JP16132881 A JP 16132881A JP 16132881 A JP16132881 A JP 16132881A JP S5861650 A JPS5861650 A JP S5861650A
Authority
JP
Japan
Prior art keywords
substrate
static electricity
layer
semiconductor device
metal film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16132881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS647499B2 (cs
Inventor
Toru Masaoka
政岡　徹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP16132881A priority Critical patent/JPS5861650A/ja
Publication of JPS5861650A publication Critical patent/JPS5861650A/ja
Publication of JPS647499B2 publication Critical patent/JPS647499B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP16132881A 1981-10-09 1981-10-09 半導体装置 Granted JPS5861650A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16132881A JPS5861650A (ja) 1981-10-09 1981-10-09 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16132881A JPS5861650A (ja) 1981-10-09 1981-10-09 半導体装置

Publications (2)

Publication Number Publication Date
JPS5861650A true JPS5861650A (ja) 1983-04-12
JPS647499B2 JPS647499B2 (cs) 1989-02-09

Family

ID=15732992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16132881A Granted JPS5861650A (ja) 1981-10-09 1981-10-09 半導体装置

Country Status (1)

Country Link
JP (1) JPS5861650A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01175096U (cs) * 1988-05-30 1989-12-13

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910685A (cs) * 1972-05-24 1974-01-30
JPS5066187A (cs) * 1973-10-12 1975-06-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910685A (cs) * 1972-05-24 1974-01-30
JPS5066187A (cs) * 1973-10-12 1975-06-04

Also Published As

Publication number Publication date
JPS647499B2 (cs) 1989-02-09

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