JPS5855806A - パタ−ン位置検出装置 - Google Patents

パタ−ン位置検出装置

Info

Publication number
JPS5855806A
JPS5855806A JP15502681A JP15502681A JPS5855806A JP S5855806 A JPS5855806 A JP S5855806A JP 15502681 A JP15502681 A JP 15502681A JP 15502681 A JP15502681 A JP 15502681A JP S5855806 A JPS5855806 A JP S5855806A
Authority
JP
Japan
Prior art keywords
register
data
circuit
output
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15502681A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0160763B2 (enrdf_load_stackoverflow
Inventor
Masahito Nakajima
雅人 中島
Tetsuo Hizuka
哲男 肥塚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15502681A priority Critical patent/JPS5855806A/ja
Publication of JPS5855806A publication Critical patent/JPS5855806A/ja
Publication of JPH0160763B2 publication Critical patent/JPH0160763B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP15502681A 1981-09-30 1981-09-30 パタ−ン位置検出装置 Granted JPS5855806A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15502681A JPS5855806A (ja) 1981-09-30 1981-09-30 パタ−ン位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15502681A JPS5855806A (ja) 1981-09-30 1981-09-30 パタ−ン位置検出装置

Publications (2)

Publication Number Publication Date
JPS5855806A true JPS5855806A (ja) 1983-04-02
JPH0160763B2 JPH0160763B2 (enrdf_load_stackoverflow) 1989-12-25

Family

ID=15597039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15502681A Granted JPS5855806A (ja) 1981-09-30 1981-09-30 パタ−ン位置検出装置

Country Status (1)

Country Link
JP (1) JPS5855806A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6134405A (ja) * 1984-07-26 1986-02-18 Fujitsu Ltd 中心位置検出装置
JPS63135105U (enrdf_load_stackoverflow) * 1987-02-24 1988-09-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6134405A (ja) * 1984-07-26 1986-02-18 Fujitsu Ltd 中心位置検出装置
JPS63135105U (enrdf_load_stackoverflow) * 1987-02-24 1988-09-05

Also Published As

Publication number Publication date
JPH0160763B2 (enrdf_load_stackoverflow) 1989-12-25

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