JPS5853980A - エツチング剤組成物 - Google Patents

エツチング剤組成物

Info

Publication number
JPS5853980A
JPS5853980A JP15241381A JP15241381A JPS5853980A JP S5853980 A JPS5853980 A JP S5853980A JP 15241381 A JP15241381 A JP 15241381A JP 15241381 A JP15241381 A JP 15241381A JP S5853980 A JPS5853980 A JP S5853980A
Authority
JP
Japan
Prior art keywords
salt
acid
fluorine
carbon atoms
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15241381A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332867B2 (enrdf_load_stackoverflow
Inventor
Iwao Hisamoto
久本　巌
Tomoaki Maeda
前田　知明
Satoru Matsuda
悟 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daikin Industries Ltd
Original Assignee
Daikin Industries Ltd
Daikin Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries Ltd, Daikin Kogyo Co Ltd filed Critical Daikin Industries Ltd
Priority to JP15241381A priority Critical patent/JPS5853980A/ja
Publication of JPS5853980A publication Critical patent/JPS5853980A/ja
Publication of JPS6332867B2 publication Critical patent/JPS6332867B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP15241381A 1981-09-25 1981-09-25 エツチング剤組成物 Granted JPS5853980A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15241381A JPS5853980A (ja) 1981-09-25 1981-09-25 エツチング剤組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15241381A JPS5853980A (ja) 1981-09-25 1981-09-25 エツチング剤組成物

Publications (2)

Publication Number Publication Date
JPS5853980A true JPS5853980A (ja) 1983-03-30
JPS6332867B2 JPS6332867B2 (enrdf_load_stackoverflow) 1988-07-01

Family

ID=15539965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15241381A Granted JPS5853980A (ja) 1981-09-25 1981-09-25 エツチング剤組成物

Country Status (1)

Country Link
JP (1) JPS5853980A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4761245A (en) * 1987-01-27 1988-08-02 Olin Corporation Etching solutions containing ammonium fluoride and an alkylphenol polyglycidol ether surfactant
US4761244A (en) * 1987-01-27 1988-08-02 Olin Corporation Etching solutions containing ammonium fluoride and an alkyl polyaccharide surfactant
US4863563A (en) * 1987-01-27 1989-09-05 Olin Corporation Etching solutions containing ammonium fluoride and a nonionic alkyl amine glycidol adduct and method of etching
WO2010113616A1 (ja) * 2009-03-31 2010-10-07 ダイキン工業株式会社 エッチング液

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4761245A (en) * 1987-01-27 1988-08-02 Olin Corporation Etching solutions containing ammonium fluoride and an alkylphenol polyglycidol ether surfactant
US4761244A (en) * 1987-01-27 1988-08-02 Olin Corporation Etching solutions containing ammonium fluoride and an alkyl polyaccharide surfactant
US4863563A (en) * 1987-01-27 1989-09-05 Olin Corporation Etching solutions containing ammonium fluoride and a nonionic alkyl amine glycidol adduct and method of etching
WO2010113616A1 (ja) * 2009-03-31 2010-10-07 ダイキン工業株式会社 エッチング液
CN102379028A (zh) * 2009-03-31 2012-03-14 大金工业株式会社 蚀刻液
KR101279293B1 (ko) * 2009-03-31 2013-06-26 다이킨 고교 가부시키가이샤 에칭액
JP5423788B2 (ja) * 2009-03-31 2014-02-19 ダイキン工業株式会社 エッチング液及びその製造方法、並びに該エッチング液を用いたエッチング方法及びエッチング処理物の製造方法

Also Published As

Publication number Publication date
JPS6332867B2 (enrdf_load_stackoverflow) 1988-07-01

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