JPS58500386A - 現場で操作する走査電子顕微鏡 - Google Patents
現場で操作する走査電子顕微鏡Info
- Publication number
- JPS58500386A JPS58500386A JP57500480A JP50048082A JPS58500386A JP S58500386 A JPS58500386 A JP S58500386A JP 57500480 A JP57500480 A JP 57500480A JP 50048082 A JP50048082 A JP 50048082A JP S58500386 A JPS58500386 A JP S58500386A
- Authority
- JP
- Japan
- Prior art keywords
- electron microscope
- lens barrel
- elastic sealing
- scanning electron
- internal chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 9
- 238000007689 inspection Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 229920001971 elastomer Polymers 0.000 claims description 2
- 239000000806 elastomer Substances 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 5
- 238000011160 research Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 210000002310 elbow joint Anatomy 0.000 description 2
- 238000001493 electron microscopy Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 101001134937 Homo sapiens Protocadherin alpha-10 Proteins 0.000 description 1
- 102100033412 Protocadherin alpha-10 Human genes 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001404 mediated effect Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010902 straw Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2602—Details
- H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR81/02152EGB | 1981-02-04 | ||
| FR8102152A FR2499314A1 (fr) | 1981-02-04 | 1981-02-04 | Ensemble de microscope electronique a balayage a fonctionnement in situ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58500386A true JPS58500386A (ja) | 1983-03-10 |
Family
ID=9254838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57500480A Pending JPS58500386A (ja) | 1981-02-04 | 1982-02-02 | 現場で操作する走査電子顕微鏡 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4516026A (cg-RX-API-DMAC7.html) |
| EP (1) | EP0057646B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JPS58500386A (cg-RX-API-DMAC7.html) |
| DE (1) | DE3265695D1 (cg-RX-API-DMAC7.html) |
| FR (1) | FR2499314A1 (cg-RX-API-DMAC7.html) |
| WO (1) | WO1982002796A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4725736A (en) * | 1986-08-11 | 1988-02-16 | Electron Beam Memories | Electrostatic electron gun with integrated electron beam deflection and/or stigmating system |
| US4766372A (en) * | 1987-02-10 | 1988-08-23 | Intel Corporation | Electron beam tester |
| DE3802598C1 (cg-RX-API-DMAC7.html) * | 1988-01-29 | 1989-04-13 | Karl Heinz 3057 Neustadt De Stellmann | |
| DE4030242A1 (de) * | 1990-09-25 | 1992-04-02 | Raith Gmbh | Vakuum-korpuskularstrahlgeraete |
| DE4140710A1 (de) * | 1991-12-10 | 1993-06-17 | Integrated Circuit Testing | Positioniersystem |
| JP2919170B2 (ja) * | 1992-03-19 | 1999-07-12 | 株式会社日立製作所 | 走査電子顕微鏡 |
| DE10135119B4 (de) * | 2001-07-19 | 2005-02-03 | Steigerwald Strahltechnik Gmbh | Nachführbare Düse für eine Elektronenstrahl-Schweißeinrichtung |
| US6897443B2 (en) * | 2003-06-02 | 2005-05-24 | Harald Gross | Portable scanning electron microscope |
| FR2867558B1 (fr) * | 2004-03-11 | 2006-06-30 | Sagem | Dispositif de releve de la topograhie d'une surface optique |
| US20070145267A1 (en) * | 2005-12-12 | 2007-06-28 | Adler David L | Portable scanning electron microscope |
| WO2007070475A2 (en) * | 2005-12-12 | 2007-06-21 | Kla-Tencor Technologies Corporation | Scanning electron microscope with crt-type electron optics |
| US8598524B2 (en) * | 2006-06-07 | 2013-12-03 | Fei Company | Slider bearing for use with an apparatus comprising a vacuum chamber |
| CN101461026B (zh) * | 2006-06-07 | 2012-01-18 | Fei公司 | 与包含真空室的装置一起使用的滑动轴承 |
| US9564291B1 (en) * | 2014-01-27 | 2017-02-07 | Mochii, Inc. | Hybrid charged-particle beam and light beam microscopy |
| CN106783493B (zh) | 2016-12-01 | 2018-07-10 | 聚束科技（北京）有限公司 | 一种真空气氛处理装置、样品观测系统及方法 |
| US12437965B1 (en) * | 2022-08-01 | 2025-10-07 | Mochil, Inc. | Charged-particle beam microscope with differential vacuum pressures |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1367468A (fr) * | 1962-04-02 | 1964-07-24 | United Aircraft Corp | Joint pour canon à électrons mobile |
| US3346736A (en) * | 1964-09-22 | 1967-10-10 | Applied Res Lab Inc | Electron probe apparatus having an objective lens with an aperture for restricting fluid flow |
| FR1480912A (fr) * | 1966-05-24 | 1967-05-12 | Inst Polygraphische Maschinen | Procédé et dispositif pour la fabrication de formes d'imprimerie |
| FR2046833B1 (cg-RX-API-DMAC7.html) * | 1969-06-17 | 1973-01-12 | Ass Elect Ind | |
| AU534811B2 (en) * | 1979-07-03 | 1984-02-16 | Unisearch Limited | Atmospheric scanning electron microscope |
| JPS5676151A (en) * | 1979-11-26 | 1981-06-23 | Mitsubishi Heavy Ind Ltd | Scanning electron microscope |
-
1981
- 1981-02-04 FR FR8102152A patent/FR2499314A1/fr active Granted
-
1982
- 1982-02-02 WO PCT/FR1982/000021 patent/WO1982002796A1/fr not_active Ceased
- 1982-02-02 JP JP57500480A patent/JPS58500386A/ja active Pending
- 1982-02-02 EP EP19820400176 patent/EP0057646B1/fr not_active Expired
- 1982-02-02 US US06/432,918 patent/US4516026A/en not_active Expired - Fee Related
- 1982-02-02 DE DE8282400176T patent/DE3265695D1/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US4516026A (en) | 1985-05-07 |
| DE3265695D1 (en) | 1985-10-03 |
| WO1982002796A1 (fr) | 1982-08-19 |
| EP0057646A2 (fr) | 1982-08-11 |
| FR2499314B1 (cg-RX-API-DMAC7.html) | 1983-04-22 |
| EP0057646B1 (fr) | 1985-08-28 |
| EP0057646A3 (en) | 1982-08-25 |
| FR2499314A1 (fr) | 1982-08-06 |
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