FR2499314A1 - Ensemble de microscope electronique a balayage a fonctionnement in situ - Google Patents

Ensemble de microscope electronique a balayage a fonctionnement in situ Download PDF

Info

Publication number
FR2499314A1
FR2499314A1 FR8102152A FR8102152A FR2499314A1 FR 2499314 A1 FR2499314 A1 FR 2499314A1 FR 8102152 A FR8102152 A FR 8102152A FR 8102152 A FR8102152 A FR 8102152A FR 2499314 A1 FR2499314 A1 FR 2499314A1
Authority
FR
France
Prior art keywords
column
assembly according
chamber
inner chamber
installation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8102152A
Other languages
English (en)
French (fr)
Other versions
FR2499314B1 (cg-RX-API-DMAC7.html
Inventor
Bernard Jouffrey
Jacques Trinquier
Jean-Luc Franceschi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR8102152A priority Critical patent/FR2499314A1/fr
Priority to US06/432,918 priority patent/US4516026A/en
Priority to PCT/FR1982/000021 priority patent/WO1982002796A1/fr
Priority to DE8282400176T priority patent/DE3265695D1/de
Priority to EP19820400176 priority patent/EP0057646B1/fr
Priority to JP57500480A priority patent/JPS58500386A/ja
Publication of FR2499314A1 publication Critical patent/FR2499314A1/fr
Application granted granted Critical
Publication of FR2499314B1 publication Critical patent/FR2499314B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR8102152A 1981-02-04 1981-02-04 Ensemble de microscope electronique a balayage a fonctionnement in situ Granted FR2499314A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR8102152A FR2499314A1 (fr) 1981-02-04 1981-02-04 Ensemble de microscope electronique a balayage a fonctionnement in situ
US06/432,918 US4516026A (en) 1981-02-04 1982-02-02 Scanning electron microscope assembly operating in situ
PCT/FR1982/000021 WO1982002796A1 (fr) 1981-02-04 1982-02-02 Ensemble de microscope electronique a balayage a fonctionnement in situ
DE8282400176T DE3265695D1 (en) 1981-02-04 1982-02-02 Scanning electron microscope for use in situ
EP19820400176 EP0057646B1 (fr) 1981-02-04 1982-02-02 Ensemble de microscope éléctronique à balayage à fonctionnement in situ
JP57500480A JPS58500386A (ja) 1981-02-04 1982-02-02 現場で操作する走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8102152A FR2499314A1 (fr) 1981-02-04 1981-02-04 Ensemble de microscope electronique a balayage a fonctionnement in situ

Publications (2)

Publication Number Publication Date
FR2499314A1 true FR2499314A1 (fr) 1982-08-06
FR2499314B1 FR2499314B1 (cg-RX-API-DMAC7.html) 1983-04-22

Family

ID=9254838

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8102152A Granted FR2499314A1 (fr) 1981-02-04 1981-02-04 Ensemble de microscope electronique a balayage a fonctionnement in situ

Country Status (6)

Country Link
US (1) US4516026A (cg-RX-API-DMAC7.html)
EP (1) EP0057646B1 (cg-RX-API-DMAC7.html)
JP (1) JPS58500386A (cg-RX-API-DMAC7.html)
DE (1) DE3265695D1 (cg-RX-API-DMAC7.html)
FR (1) FR2499314A1 (cg-RX-API-DMAC7.html)
WO (1) WO1982002796A1 (cg-RX-API-DMAC7.html)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4725736A (en) * 1986-08-11 1988-02-16 Electron Beam Memories Electrostatic electron gun with integrated electron beam deflection and/or stigmating system
US4766372A (en) * 1987-02-10 1988-08-23 Intel Corporation Electron beam tester
DE3802598C1 (cg-RX-API-DMAC7.html) * 1988-01-29 1989-04-13 Karl Heinz 3057 Neustadt De Stellmann
DE4030242A1 (de) * 1990-09-25 1992-04-02 Raith Gmbh Vakuum-korpuskularstrahlgeraete
DE4140710A1 (de) * 1991-12-10 1993-06-17 Integrated Circuit Testing Positioniersystem
JP2919170B2 (ja) * 1992-03-19 1999-07-12 株式会社日立製作所 走査電子顕微鏡
DE10135119B4 (de) * 2001-07-19 2005-02-03 Steigerwald Strahltechnik Gmbh Nachführbare Düse für eine Elektronenstrahl-Schweißeinrichtung
US6897443B2 (en) * 2003-06-02 2005-05-24 Harald Gross Portable scanning electron microscope
FR2867558B1 (fr) * 2004-03-11 2006-06-30 Sagem Dispositif de releve de la topograhie d'une surface optique
US20070145267A1 (en) * 2005-12-12 2007-06-28 Adler David L Portable scanning electron microscope
WO2007070475A2 (en) * 2005-12-12 2007-06-21 Kla-Tencor Technologies Corporation Scanning electron microscope with crt-type electron optics
US8598524B2 (en) * 2006-06-07 2013-12-03 Fei Company Slider bearing for use with an apparatus comprising a vacuum chamber
CN101461026B (zh) * 2006-06-07 2012-01-18 Fei公司 与包含真空室的装置一起使用的滑动轴承
US9564291B1 (en) * 2014-01-27 2017-02-07 Mochii, Inc. Hybrid charged-particle beam and light beam microscopy
CN106783493B (zh) 2016-12-01 2018-07-10 聚束科技（北京）有限公司 一种真空气氛处理装置、样品观测系统及方法
US12437965B1 (en) * 2022-08-01 2025-10-07 Mochil, Inc. Charged-particle beam microscope with differential vacuum pressures

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1367468A (fr) * 1962-04-02 1964-07-24 United Aircraft Corp Joint pour canon à électrons mobile
FR1480912A (fr) * 1966-05-24 1967-05-12 Inst Polygraphische Maschinen Procédé et dispositif pour la fabrication de formes d'imprimerie
FR2046833A1 (cg-RX-API-DMAC7.html) * 1969-06-17 1971-03-12 Ass Elect Ind

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3346736A (en) * 1964-09-22 1967-10-10 Applied Res Lab Inc Electron probe apparatus having an objective lens with an aperture for restricting fluid flow
AU534811B2 (en) * 1979-07-03 1984-02-16 Unisearch Limited Atmospheric scanning electron microscope
JPS5676151A (en) * 1979-11-26 1981-06-23 Mitsubishi Heavy Ind Ltd Scanning electron microscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1367468A (fr) * 1962-04-02 1964-07-24 United Aircraft Corp Joint pour canon à électrons mobile
FR1480912A (fr) * 1966-05-24 1967-05-12 Inst Polygraphische Maschinen Procédé et dispositif pour la fabrication de formes d'imprimerie
FR2046833A1 (cg-RX-API-DMAC7.html) * 1969-06-17 1971-03-12 Ass Elect Ind

Also Published As

Publication number Publication date
US4516026A (en) 1985-05-07
DE3265695D1 (en) 1985-10-03
WO1982002796A1 (fr) 1982-08-19
EP0057646A2 (fr) 1982-08-11
FR2499314B1 (cg-RX-API-DMAC7.html) 1983-04-22
JPS58500386A (ja) 1983-03-10
EP0057646B1 (fr) 1985-08-28
EP0057646A3 (en) 1982-08-25

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