JPS584914A - 酸化物磁性薄膜形成用スパツタ・タ−ゲツト - Google Patents

酸化物磁性薄膜形成用スパツタ・タ−ゲツト

Info

Publication number
JPS584914A
JPS584914A JP56103065A JP10306581A JPS584914A JP S584914 A JPS584914 A JP S584914A JP 56103065 A JP56103065 A JP 56103065A JP 10306581 A JP10306581 A JP 10306581A JP S584914 A JPS584914 A JP S584914A
Authority
JP
Japan
Prior art keywords
oxide
magnetic
thin film
substrate
fe3o4
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56103065A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0430171B2 (enrdf_load_stackoverflow
Inventor
Kozo Nishimoto
西本　幸三
Masamichi Tagami
勝通 田上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56103065A priority Critical patent/JPS584914A/ja
Publication of JPS584914A publication Critical patent/JPS584914A/ja
Publication of JPH0430171B2 publication Critical patent/JPH0430171B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Thin Magnetic Films (AREA)
  • Compounds Of Iron (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP56103065A 1981-07-01 1981-07-01 酸化物磁性薄膜形成用スパツタ・タ−ゲツト Granted JPS584914A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56103065A JPS584914A (ja) 1981-07-01 1981-07-01 酸化物磁性薄膜形成用スパツタ・タ−ゲツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56103065A JPS584914A (ja) 1981-07-01 1981-07-01 酸化物磁性薄膜形成用スパツタ・タ−ゲツト

Publications (2)

Publication Number Publication Date
JPS584914A true JPS584914A (ja) 1983-01-12
JPH0430171B2 JPH0430171B2 (enrdf_load_stackoverflow) 1992-05-21

Family

ID=14344261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56103065A Granted JPS584914A (ja) 1981-07-01 1981-07-01 酸化物磁性薄膜形成用スパツタ・タ−ゲツト

Country Status (1)

Country Link
JP (1) JPS584914A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143161U (enrdf_load_stackoverflow) * 1981-03-03 1982-09-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143161U (enrdf_load_stackoverflow) * 1981-03-03 1982-09-08

Also Published As

Publication number Publication date
JPH0430171B2 (enrdf_load_stackoverflow) 1992-05-21

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