JPS584453B2 - ハンドウタイウエハ− ノ エキシヨリソウチ - Google Patents

ハンドウタイウエハ− ノ エキシヨリソウチ

Info

Publication number
JPS584453B2
JPS584453B2 JP48105221A JP10522173A JPS584453B2 JP S584453 B2 JPS584453 B2 JP S584453B2 JP 48105221 A JP48105221 A JP 48105221A JP 10522173 A JP10522173 A JP 10522173A JP S584453 B2 JPS584453 B2 JP S584453B2
Authority
JP
Japan
Prior art keywords
liquid
tank
storage tank
cleaning
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48105221A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5057180A (en, 2012
Inventor
香西照雄
藤森敬三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP48105221A priority Critical patent/JPS584453B2/ja
Publication of JPS5057180A publication Critical patent/JPS5057180A/ja
Publication of JPS584453B2 publication Critical patent/JPS584453B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP48105221A 1973-09-18 1973-09-18 ハンドウタイウエハ− ノ エキシヨリソウチ Expired JPS584453B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48105221A JPS584453B2 (ja) 1973-09-18 1973-09-18 ハンドウタイウエハ− ノ エキシヨリソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48105221A JPS584453B2 (ja) 1973-09-18 1973-09-18 ハンドウタイウエハ− ノ エキシヨリソウチ

Publications (2)

Publication Number Publication Date
JPS5057180A JPS5057180A (en, 2012) 1975-05-19
JPS584453B2 true JPS584453B2 (ja) 1983-01-26

Family

ID=14401598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48105221A Expired JPS584453B2 (ja) 1973-09-18 1973-09-18 ハンドウタイウエハ− ノ エキシヨリソウチ

Country Status (1)

Country Link
JP (1) JPS584453B2 (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182099A (ja) * 1983-03-31 1984-10-16 小島プレス工業株式会社 クリツプピンの切断処理装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310274U (en, 2012) * 1976-07-09 1978-01-27
JPS5923416Y2 (ja) * 1977-04-28 1984-07-12 日本電気株式会社 液処理装置
JPS5444472A (en) * 1977-09-14 1979-04-07 Nippon Telegr & Teleph Corp <Ntt> Cleaning unit of semiconductor substrate
JPS58135643A (ja) * 1982-02-08 1983-08-12 Nippon Telegr & Teleph Corp <Ntt> ウエハ洗浄装置
JPS5929424A (ja) * 1982-08-11 1984-02-16 Nec Corp 半導体ウエハ−製造装置
JPS5977225U (ja) * 1982-11-15 1984-05-25 ソニー株式会社 半導体素子製造装置
JPS6273543U (en, 2012) * 1985-10-25 1987-05-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182099A (ja) * 1983-03-31 1984-10-16 小島プレス工業株式会社 クリツプピンの切断処理装置

Also Published As

Publication number Publication date
JPS5057180A (en, 2012) 1975-05-19

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