JPS58426U - ダイシング装置 - Google Patents
ダイシング装置Info
- Publication number
- JPS58426U JPS58426U JP9496481U JP9496481U JPS58426U JP S58426 U JPS58426 U JP S58426U JP 9496481 U JP9496481 U JP 9496481U JP 9496481 U JP9496481 U JP 9496481U JP S58426 U JPS58426 U JP S58426U
- Authority
- JP
- Japan
- Prior art keywords
- dicing
- nozzle
- rotating blade
- dicing equipment
- abstract
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003672 processing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Details Of Cutting Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9496481U JPS58426U (ja) | 1981-06-25 | 1981-06-25 | ダイシング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9496481U JPS58426U (ja) | 1981-06-25 | 1981-06-25 | ダイシング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58426U true JPS58426U (ja) | 1983-01-05 |
JPS6331927Y2 JPS6331927Y2 (enrdf_load_stackoverflow) | 1988-08-25 |
Family
ID=29889886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9496481U Granted JPS58426U (ja) | 1981-06-25 | 1981-06-25 | ダイシング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58426U (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008192682A (ja) * | 2007-02-01 | 2008-08-21 | Nec Electronics Corp | ダイシング方法およびダイシング装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5145691U (enrdf_load_stackoverflow) * | 1974-10-02 | 1976-04-03 | ||
JPS55112761A (en) * | 1979-02-20 | 1980-08-30 | Disco Abrasive Sys Ltd | Dry type cutting method |
-
1981
- 1981-06-25 JP JP9496481U patent/JPS58426U/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5145691U (enrdf_load_stackoverflow) * | 1974-10-02 | 1976-04-03 | ||
JPS55112761A (en) * | 1979-02-20 | 1980-08-30 | Disco Abrasive Sys Ltd | Dry type cutting method |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008192682A (ja) * | 2007-02-01 | 2008-08-21 | Nec Electronics Corp | ダイシング方法およびダイシング装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6331927Y2 (enrdf_load_stackoverflow) | 1988-08-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS58426U (ja) | ダイシング装置 | |
JPS60130010U (ja) | 半導体ウエハ−の切断装置 | |
JPS62118443U (enrdf_load_stackoverflow) | ||
JPS58159742U (ja) | 半導体ペレツタイズ装置 | |
JPS6313642U (enrdf_load_stackoverflow) | ||
JPS6122348U (ja) | ダイシング装置 | |
JPS59137012U (ja) | 半導体ペレツタイズ装置 | |
JPS5997825U (ja) | 線材表面皮削り加工装置 | |
JPS6397454U (enrdf_load_stackoverflow) | ||
JPS5821411U (ja) | ダイシングソ− | |
JPS58183474U (ja) | 凝縮器の散水装置 | |
JPS58155833U (ja) | 回転式半導体ウエハ−洗浄装置 | |
JPS58114042U (ja) | シリコンウエハ−の洗浄装置 | |
JPS59109463U (ja) | ナツト供給装置 | |
JPS5885418U (ja) | 段曲げ金型の保持装置 | |
JPS59184952U (ja) | 半導体チップの樹脂モールド用ノズル | |
JPS59177940U (ja) | 洗浄装置 | |
JPS5840301U (ja) | チユ−ブ開先加工装置 | |
JPS6263928U (enrdf_load_stackoverflow) | ||
JPS62153048U (enrdf_load_stackoverflow) | ||
JPS60194334U (ja) | 半導体ウエハの洗浄装置 | |
JPS5846442U (ja) | 平面位置出し装置 | |
JPS59103441U (ja) | 半導体集積回路 | |
JPS60187534U (ja) | 自動洗浄装置 | |
JPS5858340U (ja) | 半導体ウエハ−のスクライバ− |