JPS58426U - ダイシング装置 - Google Patents
ダイシング装置Info
- Publication number
- JPS58426U JPS58426U JP9496481U JP9496481U JPS58426U JP S58426 U JPS58426 U JP S58426U JP 9496481 U JP9496481 U JP 9496481U JP 9496481 U JP9496481 U JP 9496481U JP S58426 U JPS58426 U JP S58426U
- Authority
- JP
- Japan
- Prior art keywords
- dicing
- nozzle
- rotating blade
- dicing equipment
- abstract
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 3
- 238000003672 processing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Details Of Cutting Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9496481U JPS58426U (ja) | 1981-06-25 | 1981-06-25 | ダイシング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9496481U JPS58426U (ja) | 1981-06-25 | 1981-06-25 | ダイシング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58426U true JPS58426U (ja) | 1983-01-05 |
| JPS6331927Y2 JPS6331927Y2 (enrdf_load_stackoverflow) | 1988-08-25 |
Family
ID=29889886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9496481U Granted JPS58426U (ja) | 1981-06-25 | 1981-06-25 | ダイシング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58426U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008192682A (ja) * | 2007-02-01 | 2008-08-21 | Nec Electronics Corp | ダイシング方法およびダイシング装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5145691U (enrdf_load_stackoverflow) * | 1974-10-02 | 1976-04-03 | ||
| JPS55112761A (en) * | 1979-02-20 | 1980-08-30 | Disco Abrasive Sys Ltd | Dry type cutting method |
-
1981
- 1981-06-25 JP JP9496481U patent/JPS58426U/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5145691U (enrdf_load_stackoverflow) * | 1974-10-02 | 1976-04-03 | ||
| JPS55112761A (en) * | 1979-02-20 | 1980-08-30 | Disco Abrasive Sys Ltd | Dry type cutting method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008192682A (ja) * | 2007-02-01 | 2008-08-21 | Nec Electronics Corp | ダイシング方法およびダイシング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6331927Y2 (enrdf_load_stackoverflow) | 1988-08-25 |
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