JPS5841409A - 薄膜磁気ヘツド - Google Patents
薄膜磁気ヘツドInfo
- Publication number
- JPS5841409A JPS5841409A JP13852781A JP13852781A JPS5841409A JP S5841409 A JPS5841409 A JP S5841409A JP 13852781 A JP13852781 A JP 13852781A JP 13852781 A JP13852781 A JP 13852781A JP S5841409 A JPS5841409 A JP S5841409A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- insulating layer
- film
- organic insulating
- magnetic film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 21
- 239000004020 conductor Substances 0.000 claims abstract description 22
- 239000010408 film Substances 0.000 claims description 58
- 238000005530 etching Methods 0.000 abstract description 3
- 238000009413 insulation Methods 0.000 abstract 6
- 239000000126 substance Substances 0.000 abstract 4
- 238000000034 method Methods 0.000 description 13
- 229920001721 polyimide Polymers 0.000 description 7
- 239000009719 polyimide resin Substances 0.000 description 7
- 239000011368 organic material Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 235000019589 hardness Nutrition 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 241000931705 Cicada Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13852781A JPS5841409A (ja) | 1981-09-04 | 1981-09-04 | 薄膜磁気ヘツド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13852781A JPS5841409A (ja) | 1981-09-04 | 1981-09-04 | 薄膜磁気ヘツド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5841409A true JPS5841409A (ja) | 1983-03-10 |
| JPS649648B2 JPS649648B2 (enExample) | 1989-02-20 |
Family
ID=15224231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13852781A Granted JPS5841409A (ja) | 1981-09-04 | 1981-09-04 | 薄膜磁気ヘツド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5841409A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4550353A (en) * | 1982-12-08 | 1985-10-29 | Computer Basic Technology Research | Thin-film magnetic head and method for fabricating the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5758216A (en) * | 1980-09-24 | 1982-04-07 | Fujitsu Ltd | Thin film magnetic head |
-
1981
- 1981-09-04 JP JP13852781A patent/JPS5841409A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5758216A (en) * | 1980-09-24 | 1982-04-07 | Fujitsu Ltd | Thin film magnetic head |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4550353A (en) * | 1982-12-08 | 1985-10-29 | Computer Basic Technology Research | Thin-film magnetic head and method for fabricating the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS649648B2 (enExample) | 1989-02-20 |
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