JPS5837548Y2 - 真空吸着板 - Google Patents

真空吸着板

Info

Publication number
JPS5837548Y2
JPS5837548Y2 JP1979066751U JP6675179U JPS5837548Y2 JP S5837548 Y2 JPS5837548 Y2 JP S5837548Y2 JP 1979066751 U JP1979066751 U JP 1979066751U JP 6675179 U JP6675179 U JP 6675179U JP S5837548 Y2 JPS5837548 Y2 JP S5837548Y2
Authority
JP
Japan
Prior art keywords
suction
groove
vacuum suction
wafer
suction plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979066751U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55169351U (enExample
Inventor
篤暢 宇根
嘉之 上野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1979066751U priority Critical patent/JPS5837548Y2/ja
Publication of JPS55169351U publication Critical patent/JPS55169351U/ja
Application granted granted Critical
Publication of JPS5837548Y2 publication Critical patent/JPS5837548Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1979066751U 1979-05-21 1979-05-21 真空吸着板 Expired JPS5837548Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979066751U JPS5837548Y2 (ja) 1979-05-21 1979-05-21 真空吸着板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979066751U JPS5837548Y2 (ja) 1979-05-21 1979-05-21 真空吸着板

Publications (2)

Publication Number Publication Date
JPS55169351U JPS55169351U (enExample) 1980-12-05
JPS5837548Y2 true JPS5837548Y2 (ja) 1983-08-24

Family

ID=29300690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979066751U Expired JPS5837548Y2 (ja) 1979-05-21 1979-05-21 真空吸着板

Country Status (1)

Country Link
JP (1) JPS5837548Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10235482B3 (de) * 2002-08-02 2004-01-22 Süss Microtec Lithography Gmbh Vorrichtung zum Fixieren dünner und flexibler Substrate

Also Published As

Publication number Publication date
JPS55169351U (enExample) 1980-12-05

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