JPS55169351U - - Google Patents
Info
- Publication number
- JPS55169351U JPS55169351U JP1979066751U JP6675179U JPS55169351U JP S55169351 U JPS55169351 U JP S55169351U JP 1979066751 U JP1979066751 U JP 1979066751U JP 6675179 U JP6675179 U JP 6675179U JP S55169351 U JPS55169351 U JP S55169351U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979066751U JPS5837548Y2 (ja) | 1979-05-21 | 1979-05-21 | 真空吸着板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979066751U JPS5837548Y2 (ja) | 1979-05-21 | 1979-05-21 | 真空吸着板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55169351U true JPS55169351U (enExample) | 1980-12-05 |
| JPS5837548Y2 JPS5837548Y2 (ja) | 1983-08-24 |
Family
ID=29300690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979066751U Expired JPS5837548Y2 (ja) | 1979-05-21 | 1979-05-21 | 真空吸着板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5837548Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004072108A (ja) * | 2002-08-02 | 2004-03-04 | Suss Microtec Lithography Gmbh | 薄く可撓性のある基板を固定する装置 |
-
1979
- 1979-05-21 JP JP1979066751U patent/JPS5837548Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004072108A (ja) * | 2002-08-02 | 2004-03-04 | Suss Microtec Lithography Gmbh | 薄く可撓性のある基板を固定する装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5837548Y2 (ja) | 1983-08-24 |